Granted Patent
Utility
US 6,561,213
· Confirmation No. 6804
FLUID DISTRIBUTION SYSTEM AND PROCESS, AND SEMICONDUCTOR FABRICATION FACILITY UTILIZING SAME
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-05 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-06-05 | SPEC |
Specification | 26 | View | |
| 2001-06-05 | CLM |
Claims | 13 | View | |
| 2001-06-05 | ABST |
Abstract | 1 | View | |
| 2001-06-05 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2001-06-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
137/263
Prosecution
- Examiner
- LEE, KEVIN L
- Art Unit
- 3753
- Docket No.
- 487-CIP
- Confirmation No.
- 6804
Publication
- Pub. No.
- US20020007849A1
- Pub. Date
- 2002-01-24
Patent Term Adjustment
-142days
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-04
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-06-05
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Quick Facts
- Patent No.
- US 6,561,213
- App. No.
- 09/874,084
- Filed
- 2001-06-05
- Granted
- 2003-05-13
- Pub. No.
- US20020007849A1
- Examiner
- LEE, KEVIN L
- Art Unit
- 3753
- PTA
- -142 days
External Links