Patent Assignment
Reel/Frame 011882/0048
Assignment of Assignor's Interest
Recorded: 2001-06-05
Received: 2001-06-14
Pages: 3
Assignors
WANG, LUPING
Executed: 2001-05-23
TABLER, TERRY A.
Executed: 2001-05-29
DIETZ, JAMES A.
Executed: 2001-05-31
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CT, 06810, UNITED STATES
Covered Property
(1)
Fluid Distribution System and Process, and Semiconductor Fabrication Facility Utilizing Same
Application:
09/874,084 →