IP Library Granted Patent US 9,617,988
Granted Patent B2
US 9,617,988 · App. 14/466,115 · Granted Apr 11, 2017

System and method for variable dispense position

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Quick Facts
Patent No.
US 9,617,988
App. No.
14/466,115
Granted
Apr 11, 2017
Kind
B2
Abstract

Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

Claims (34)

1. A pumping system, comprising:

a dispense pump, comprising:

a dispense chamber; and

a dispense diaphragm connected to a piston and movable by the piston to multiple positions within the dispense chamber, wherein the multiple positions include:

a dispense pump hard stop position corresponding to zero available volume for holding a process fluid in the dispense pump; and

a dispense pump home position defining an available volume for holding a process fluid in the dispense pump in a dispense cycle;

wherein the dispense pump has a maximum available volume for holding a process fluid and wherein the available volume is less than the maximum available volume.

2. The pumping system of claim 1 , wherein the dispense pump home position is determined by a controller based on one or more parameters for a dispense operation.

3. The pumping system of claim 1 , wherein the dispense pump home position is variable according to a set of processes capable of being performed by the pumping system.

4. The pumping system of claim 1 , wherein the multiple positions include a second dispense pump home position corresponding to a second available volume for holding a second process fluid capable of being performed by the pumping system.

5. The pumping system of claim 1 , further comprising a feed pump at a first stage of operation of the pumping system, wherein the dispense pump is downstream from the feed pump, and wherein the dispense pump operates at a second stage of operation of the pumping system.

6. A method, comprising:

at a pumping system comprising a dispense pump having a dispense chamber and a dispense diaphragm connected to a piston and movable by the piston to multiple positions within the dispense chamber, the multiple positions including a dispense pump hard stop position corresponding to zero available volume for holding a process fluid in the dispense pump:

moving the dispense diaphragm to a dispense pump home position defining an available volume for holding a process fluid in the dispense pump in a dispense cycle, wherein the dispense pump has a maximum available volume for holding a process fluid and wherein the available volume is less than the maximum available volume.

7. The method according to claim 6 , wherein the dispense pump home position is determined by a controller based on one or more parameters for a dispense operation.

8. The method according to claim 6 , wherein the dispense pump home position is variable according to a set of processes capable of being performed by the pumping system.

9. The method according to claim 6 , further comprising:

moving the dispense diaphragm to a second dispense pump home position corresponding to a second available volume for holding a second process fluid capable of being performed by the pumping system.

10. The method according to claim 6 , wherein the pumping system further comprises a feed pump at a first stage of operation of the pumping system, wherein the dispense pump is downstream from the feed pump, and wherein the dispense pump operates at a second stage of operation of the pumping system.

11. A pumping system, comprising:

A pump having a chamber and a diaphragm connected to a piston and movable by the piston to multiple positions in the chamber, the chamber having a fluid capacity, the diaphragm positionable in the chamber based on a set of factors affecting a dispense operation, the set of factors comprising a dispense volume and a hold-up volume;

wherein, prior to dispensing a fluid from the pumping system, the diaphragm is moved to a home position in the chamber;

wherein the home position defines an available volume for a holding process fluid in the pump in a dispense cycle;

wherein the available volume for holding the process fluid in the pump in the dispense cycle includes the dispense volume and the hold-up volume; and

wherein the available volume for holding the process fluid in the pump in the dispense cycle is less than the fluid capacity of the chamber.

12. The pumping system of claim 11 , further comprising a pump controller, wherein the pump is controlled by the pump controller to move the diaphragm in the chamber to the home position.

13. The pumping system of claim 11 , wherein the diaphragm is moved to the home position in the chamber after completion of a filtration segment of the dispense cycle.

14. The pumping system of claim 11 , wherein the pump is a feed pump that feeds the fluid to a dispense pump.

15. The pumping system of claim 11 , wherein the pump is a dispense pump downstream of a feed pump and receives the fluid from the feed pump.

16. The pumping system of claim 11 , wherein the hold-up volume is user-selected.

17. The pumping system of claim 16 , wherein the user-selected hold-up volume corresponds to a volume of the pump that is outside an effective range of the pump, wherein the effective range of the pump defines a linear region of the pump where the diaphragm experiences low stress.

18. The pumping system of claim 11 , wherein the set of factors affecting the dispense operation includes at least one of an error volume, a dispense rate, dispense time, a purge volume, a suckback volume, a vent volume, a predispense rate, a predispense volume, an effective range of the pump, or a user defined volume.

19. The pumping system of claim 11 , further comprising a motor, wherein the diaphragm is driven to the home position in the chamber by the motor.

20. The pumping system of claim 19 , further comprising a position sensor, wherein the motor is controlled using real time feedback from the position sensor.

Assignments (5)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 1, 2014
From: CAHILL, WILLIAM R, JR; BURCH, ROBERT RAY; HORSAGER, JEFFREY JON; REISACK, JESSICA LINDA; ALTLAND, JENNIFER MARIE
To: E. I. DU PONT DE NEMOURS AND COMPANY
Reel/Frame 033644/0478 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 22, 2014
From: LAVERDIERE, MARC; CEDRONE, JAMES; GONNELLA, GEORGE; GASHGAEE, IRAJ; MAGOON, PAUL; KING, TIMOTHY J.
To: ENTEGRIS, INC.
Reel/Frame 033591/0616 →