IP Library Granted Patent US 10,850,279
Granted Patent B2
US 10,850,279 · App. 15/561,226 · Granted Dec 1, 2020

Bottom opening pod with magnetically coupled casssettes

Inventor: Gregory Bores (Prior Lake, MN)
Assignee: ENTEGRIS, INC.
B01L3/50853B01L9/52H01L21/67373B01L2200/025B01L2200/141B01L2300/041G01N2035/0465
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,850,279
App. No.
15/561,226
Granted
Dec 1, 2020
Kind
B2
Abstract

A bottom opening pod utilizing magnetic coupling for securing one or more cassettes within. The pod includes magnetic couplers that provide magnetic coupling between the cassette(s) and the bottom door of the pod. The magnetic couplers may include magnetic elements disposed on a base of the cassette and on the bottom door of the pod. The magnetic coupling secures the cassette(s) to the bottom door without imposition of separation forces between the housing and the bottom door of the pod.

Claims (26)

1. A bottom opening pod, comprising:

a bottom door;

a housing that cooperates with the bottom door to define an interior chamber, wherein the bottom door is received in a door opening defined in a bottom of the housing;

a first cassette disposed in the interior chamber and mounted to an upper surface of the bottom door; and

a first magnetic coupler adapted to magnetically couple the first cassette to the bottom door, wherein the first magnetic coupler includes a first coded magnet mounted on a bottom surface the first cassette and a second coded magnet mounted on the upper surface of the bottom door and wherein the first and second coded magnets are magnetically keyed for centering and biasing the first cassette in a preferred rotational orientation with respect to the bottom door.

2. The bottom opening pod of claim 1 , wherein the first magnetic coupler includes a permanent magnet.

3. The bottom opening pod of claim 1 , wherein the first cassette and the bottom door include complementary mating structures for rotational alignment of the first cassette on the bottom door.

4. The bottom opening pod of claim 3 , wherein the complimentary mating structures are configured to align the first cassette in a single rotational orientation.

5. The bottom opening pod of claim 1 , wherein the bottom opening pod is a standard mechanical interface pod.

6. The bottom opening pod of claim 1 , comprising a second cassette and including a second magnetic coupler for magnetically coupling the second cassette to the bottom door.

7. The bottom opening pod of claim 1 , comprising a second magnetic coupler adapted to magnetically couple the first cassette to the bottom door.

8. The bottom opening pod of claim 7 , wherein the second magnetic coupler includes a permanent magnet.

9. The bottom opening pod of claim 7 , wherein:

the first magnetic coupler includes a first permanent magnet mounted on the first cassette and a second permanent magnet mounted on the bottom door; and

the second magnetic coupler includes a third permanent magnet mounted on the first cassette and a fourth permanent magnet mounted on the bottom door.

10. The bottom opening pod of claim 9 , wherein the first permanent magnet and the second permanent magnet cooperate with and the third permanent magnet and the fourth permanent magnet to bias the first cassette toward a rotational alignment with respect to the bottom door.

11. The bottom opening pod of claim 10 , wherein:

the first permanent magnet and the second permanent magnet are coded magnets configured to center with each other; and

the third permanent magnet and the fourth permanent magnet are coded magnets configured to center with each other.

12. The bottom opening pod of claim 11 , wherein the coded magnets are magnetically keyed for biasing the first cassette in a preferred rotational orientation with respect to the bottom door.

13. The bottom opening pod of claim 10 , wherein a coupling face of the first permanent magnet is configured to repel a coupling face of the third permanent magnet, such that a repulsion force is generated between the first cassette and the bottom door when the first permanent magnet is aligned with the third permanent magnet.

14. The bottom opening pod of claim 13 , wherein a coupling face of the second permanent magnet is configured to repel a coupling face of the fourth permanent magnet, such that a repulsion force is generated between the first cassette and the bottom door when the second permanent magnet is aligned with the fourth permanent magnet.

15. The bottom opening pod of claim 7 , wherein:

the first cassette and the bottom door include complementary mating structures for rotational alignment of the first cassette on the bottom door; and

the second cassette and the bottom door include complementary mating structures for rotational alignment of the second cassette on the bottom door.

16. The bottom opening pod of claim 1 , comprising a circular seal member disposed between the housing and the bottom door.

Assignments (4)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 19, 2018
From: BORES, GREGORY
To: ENTEGRIS, INC.
Reel/Frame 047232/0467 →
Continuity (2)
Provisional Application 62139269 · Mar 27, 2015
Related Publication 20180056291A1 · Mar 1, 2018
Cited By (1)
US 12,378,514