Patent Application
Provisional
App. No. 62/599,098
· Confirmation No. 8590
METHODS AND ASSEMBLIES USING FLOURINE CONTAINING AND INERT GASSES FOR PLASMA FLOOD GUN (PFG) OPERATION
Applicant:
Entegris, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-01-04 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-12-15 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View | |
| 2017-12-15 | ADS |
Application Data Sheet | 8 | View | |
| 2017-12-15 | SPEC |
Specification | 22 | View | |
| 2017-12-15 | CLM |
Claims | 4 | View | |
| 2017-12-15 | ABST |
Abstract | 1 | View | |
| 2017-12-15 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2017-12-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-12-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Sharad N. Yedave
Danbury, CT
Ying Tang
Danbury, CT
Joseph D. Sweeney
Winsted, CT
Joseph R. Despres
Middletown, CT
Attorneys & Agents of Record
Prosecution
- Customer No.
- 144070
- Docket No.
- E000033
- Confirmation No.
- 8590
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-10-19
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Quick Facts
- App. No.
- 62/599,098
- Filed
- 2017-12-15
External Links