IP Library Granted Patent US 8,382,444
Granted Patent B2
US 8,382,444 · App. 12/983,737 · Granted Feb 26, 2013

System and method for monitoring operation of a pump

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Quick Facts
Patent No.
US 8,382,444
App. No.
12/983,737
Granted
Feb 26, 2013
Kind
B2
Abstract

Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

Claims (90)

1. A method for controlling fluid pressure in a multi-stage pump

comprising:

accessing a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense cycle including multiple segments;

continually determining values of the operating parameter during the new dispense cycle;

creating a first operating profile for the operating parameter using the values of the operating parameter;

comparing the first operating profile with the baseline profile to confirm that the new dispense cycle resulted in a good dispense; and

if a good dispense did not occur, performing one or more of sending an alarm and changing the operation of the multi-stage pump;

wherein operating the feed pump, dispense pump and set of valves to perform the new dispense cycle comprises:

operating the feed pump to reduce a volume of a feed chamber at a first predetermined rate;

opening a barrier valve to allow a fluid in the feed chamber to enter a dispense chamber while keeping an outlet valve closed so that none of the fluid entering the dispense chamber is dispensed;

taking pressure measurements of the fluid using a pressure sensor;

determining whether a first pressure measurement is greater than a predetermined pressure;

in response to the first pressure measurement being greater than said predetermined pressure, operating the dispense pump to increase a volume of the dispense chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than the first threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not reached the predetermined volume, repeating the method from the step of measuring the second pressure; and

in response to determining that the volume of the dispense chamber has reached the predetermined volume, stopping the operation of the feed pump and the dispense pump.

2. The method of claim 1 , wherein the operating parameter comprises a pressure in the multi-stage pump.

3. The method of claim 1 , wherein the operating parameter comprises a motor speed.

4. The method of claim 1 , wherein the operating parameter comprises a motor position.

5. The method of claim 1 , wherein the operating parameter comprises a current supplied to a motor.

6. A multi-stage pump comprising:

a feed pump comprising:

a feed chamber;

a first diaphragm movable in the feed chamber;

a first lead screw to move the first diaphragm;

a first motor coupled to the first lead screw to rotate the first lead screw;

a dispense pump fluidly coupled to the feed pump, the dispense pump comprising:

a dispense chamber;

a second diaphragm movable in the dispense chamber;

a second lead screw to move the second diaphragm;

a second motor coupled to the second lead screw to rotate the second lead screw;

a filter disposed in a fluid flow path between the feed pump and the dispense pump;

a set of valves comprising:

an inlet valve;

an isolation valve;

a barrier valve; and

an outlet valve;

a pressure sensor positioned to measure pressure in the multi-stage pump; and

a pump controller comprising a processor and a tangible, non-transitory computer readable medium storing a set of instructions executable to cause the controller to:

access a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operate the feed pump, the dispense pump and the set of valves to perform a new dispense cycle including multiple segments;

continually determine values of the operating parameter during the new dispense cycle;

create a first operating profile for the operating parameter using the values of the operating parameter;

compare the first operating profile with the baseline profile to confirm that the new dispense cycle resulted in a good dispense; and

if a good dispense did not occur, perform one or more of sending an alarm and changing the operation of the multi-stage pump;

wherein operating the feed pump, the dispense pump and the set of valves to perform the new dispense cycle comprises:

operating the feed pump to reduce a volume of the feed chamber at a first predetermined rate;

opening the barrier valve to allow a fluid in the feed chamber to enter the dispense chamber while keeping the outlet valve closed so that none of the fluid entering the dispense chamber is dispensed;

taking pressure measurements of the fluid using the pressure sensor;

determining whether a first pressure measurement is greater than a predetermined pressure;

in response to the first pressure measurement being greater than said predetermined pressure, operating the dispense pump to increase a volume of the dispense chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than the first threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not reached the predetermined volume, repeating the method from the step of measuring the second pressure; and

in response to determining that the volume of the dispense chamber has reached the predetermined volume, stopping the operation of the feed pump and the dispense pump.

7. The multi-stage pump of claim 6 , wherein the operating parameter comprises a pressure in the multi-stage pump.

8. The multi-stage pump of claim 6 , wherein the operating parameter comprises a motor speed.

9. The multi-stage pump of claim 6 , wherein the operating parameter comprises a motor position.

10. The multi-stage pump of claim 6 , wherein the operating parameter comprises a current supplied to the first motor or the second motor.

11. A computer program product comprising a tangible, non-transitory computer readable medium storing instructions executable to perform a method of controlling a multi-stage pump, the method comprising:

accessing a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense cycle including multiple segments;

continually determining values of the operating parameter during the new dispense cycle;

creating a first operating profile for the operating parameter using the values of the operating parameter;

comparing the first operating profile with the baseline profile to confirm that the new dispense cycle resulted in a good dispense; and

if a good dispense did not occur, performing one or more of sending an alarm and changing the operation of the multi-stage pump;

wherein operating the feed pump, the dispense pump and the set of valves to perform the new dispense cycle comprises:

operating the feed pump to reduce a volume of a feed chamber at a first predetermined rate;

opening a barrier valve to allow a fluid in the feed chamber to enter a dispense chamber while keeping an outlet valve closed so that none of the fluid entering the dispense chamber is dispensed;

taking pressure measurements of the fluid using a pressure sensor;

determining whether a first pressure measurement is greater than a predetermined pressure;

in response to the first pressure measurement being greater than said predetermined pressure, operating the dispense pump to increase a volume of the dispense chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than the first threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not reached the predetermined volume, repeating the method from the step of measuring the second pressure; and

in response to determining that the volume of the dispense chamber has reached the predetermined volume, stopping the operation of the feed pump and the dispense pump.

12. The computer program product of claim 11 , operating parameter comprises the pressure in the multi-stage pump.

13. The computer program product of claim 11 , wherein the operating parameter comprises a motor speed.

14. The computer program product of claim 11 , wherein the operating parameter comprises a motor position.

Assignments (8)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 3, 2011
From: GONNELLA, GEORGE; CEDRONE, JAMES
To: ENTEGRIS, INC.
Reel/Frame 025761/0807 →