IP Library Granted Patent US 8,662,859
Granted Patent B2
US 8,662,859 · App. 13/615,926 · Granted Mar 4, 2014

System and method for monitoring operation of a pump

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Quick Facts
Patent No.
US 8,662,859
App. No.
13/615,926
Granted
Mar 4, 2014
Kind
B2
Abstract

Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

Claims (39)

1. A method for controlling fluid pressure in a multi-stage pump, comprising:

accessing a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense cycle including multiple segments, comprising a dispense segment and at least one additional segment in which fluid is not dispensed, wherein the dispense pump comprises a diaphragm that moves within a dispense chamber to displace fluid, a motor driven piston in contact with the diaphragm and a motor coupled to the piston;

continually determining values of the operating parameter during the new dispense cycle including during the dispense segment and the at least one additional segment;

creating a first operating profile for the operating parameter using the determined values of the operating parameter;

comparing the first operating profile of determined values with the baseline profile to determine if the new dispense cycle resulted in a good dispense, wherein comparing the first operating profile with the baseline profile comprises comparing each of a plurality of the determined values from the operating profile to a corresponding one of a plurality of values from the baseline profile; and

if the good dispense did not occur, performing one or more of sending an alarm and changing an operation of the multi-stage pump.

2. The method of claim 1 , wherein the values of the operating parameter are continually determined as a sampling rate of between one millisecond and ten millisecond intervals.

3. The method of claim 2 , wherein comparing the first operating profile with the baseline profile to confirm the new dispense cycle resulted in the good dispense comprises, for each of a set of points of the baseline profile comparing a first value of the operating parameter at that point of the baseline profile with a second value of the operating profile at an equivalent point in the first operating profile to see if a difference between the first value and the second value is outside a tolerance.

4. The method of claim 3 , wherein the operating parameter is pressure and the tolerance is between approximately 0.01 and 0.5 PSI.

5. A multi-stage pump comprising:

a feed pump comprising a feed chamber;

a dispense pump fluidly coupled to the feed pump, the dispense pump comprising a dispense chamber, the dispense pump comprising a diaphragm that moves within a pressure chamber to displace fluid, a motor driven piston in contact with the diaphragm and a motor coupled to the piston;

a set of valves, comprising:

an inlet valve;

an isolation valve;

a barrier valve; and

an outlet valve;

a pressure sensor open to the dispense chamber of the multi-stage pump; and

a pump controller comprising a processor and a tangible, non-transitory computer readable medium storing a set of instructions executable to cause the controller to:

access a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump,

operate the feed pump, the dispense pump and the set of valves to perform a new dispense cycle including multiple segments comprising a dispense segment and at least one additional segment in which fluid is not dispensed,

continually determine values of the operating parameter during the dispense segment and the at least one additional segment of the new dispense cycle,

create a first operating profile for the operating parameter using the determined values of the operating parameter,

compare the first operating profile of determined values with the baseline profile to determine if the new dispense cycle resulted in a good dispense, wherein comparing the first operating profile with the baseline profile comprising comparing each of the plurality of the determined values from the operating profile to a corresponding one of a plurality of values from the baseline profile and

if the good dispense did not occur, perform one or more of sending an alarm and changing an operation of the multi-stage pump.

6. The multi-stage pump of claim 5 , wherein the values of the operating parameter are continually determined as a sampling rate of between one millisecond and ten millisecond intervals.

7. The multi-stage pump of claim 6 , wherein comparing the first operating profile with the baseline profile to confirm the new dispense cycle resulted in the good dispense comprises, for each of set of points of the baseline profile comparing a first value of the operating parameter at that point of the baseline profile with a second value of the operating profile at an equivalent point in the first operating profile to see if a difference between the first value and the second value is outside a tolerance.

8. The multi-stage pump of claim 7 , wherein the operating parameter is pressure and the tolerance is between approximately 0.01 and 0.5 PSI.

9. A computer program product comprising a tangible, non-transitory computer readable medium storing instructions executable to perform a method of controlling a multi-stage pump, the method comprising:

accessing a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense cycle including multiple segments comprising a dispense segment and at least one additional segment in which fluid is not dispensed;

continually determining values of the operating parameter during the dispense segment and the at least one additional segment new dispense cycle;

creating a first operating profile for the operating parameter using the determined values of the operating parameter;

comparing the first operating profile of determined values with the baseline profile to determine if the new dispense cycle resulted in a good dispense, wherein comparing the first operating profile with the baseline profile comprises comparing each of a plurality of the determined values from the operating profile to a corresponding one of a plurality of values from the baseline profile; and

if the good dispense did not occur, performing one or more of sending an alarm and changing an operation of the multi-stage pump.

10. The computer program product of claim 9 , wherein the values of the operating parameter are continually determined as a sampling rate of between one millisecond and ten millisecond intervals.

11. The computer program product of claim 10 , wherein comparing the first operating profile with the baseline profile to confirm the new dispense cycle resulted in the good dispense comprises, for each of set of points of the baseline profile comparing a first value of the operating parameter at that point of the baseline profile with a second value of the operating profile at an equivalent point in the first operating profile to see if a difference between the first value and the second value is outside a tolerance.

12. The computer program product of claim 11 , wherein the operating parameter is pressure and the tolerance is between approximately 0.01 and 0.5 PSI.

Assignments (7)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →