IP Library Granted Patent US 10,734,264
Granted Patent B2
US 10,734,264 · App. 15/573,311 · Granted Aug 4, 2020

Wafer container with external passive getter module

Inventors: Jeffrey J. King (Colorado Springs, CO); Matthew A. Fuller (Colorado Springs, CO); John Burns (Colorado Springs, CO); Martin Forbes (Divide, CO)
Assignee: ENTEGRIS, INC.
H01L21/67393H01L23/564
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Quick Facts
Patent No.
US 10,734,264
App. No.
15/573,311
Granted
Aug 4, 2020
Kind
B2
Abstract

A semiconductor wafer container assembly includes a container defining an exterior and defining an interior having a wafer storage area adapted to support one or more semiconductor wafers. The container also defines an opening in the container between the exterior and the interior. The container has a door and a latching mechanism to sealingly secure the door closed, and the door is openable for access to the wafer storage area. A passive getter module is removably secured with respect to the exterior of the container by substantially rigid connection structure that is a part of or extends from substantially rigid getter module housing. Getter material is disposed within the housing to decrease concentration of contaminants within the wafer storage area of the container via the access opening and the opening in the container.

Claims (19)

1. A substrate container assembly, comprising:

a container, the container defining an exterior and defining an interior having a substrate storage area adapted to support one or more substrates, the container also defining an opening in the container between the exterior and the interior; the container having a door and a latching mechanism to sealingly secure the door closed, the door being openable for access to the substrate storage area, the door defining an interior side facing the interior of the container; and

a getter module mounted to the container, the getter module comprising:

a substantially rigid housing with an access opening;

a getter material disposed within the substantially rigid housing, the getter material arranged to passively decrease concentration of contaminants within the substrate storage area of the container via the access opening and the opening in the container, free of any active purge flow through the getter module; and

a filter positioned at the access opening, the filter including a filter housing containing a filter material, the housing defining windows therein.

2. The substrate container assembly of claim 1 , further comprising a connection structure, the connection structure adapted to removably and sealingly secure the getter module with respect to the exterior of the container and to connect the access opening in the getter module housing to the opening in the container, whereby the getter material is positioned exterior the container and is communicable outside the module housing with the interior of the container.

3. The container assembly of claim 1 , wherein the getter module comprises a base, getter material supported by the base, a cover to close the base, and a seal disposed between the cover and the base.

4. The container assembly of claim 1 , wherein the getter material is disposed in or formed as a readily removable and replaceable getter cartridge.

5. The container assembly of claim 1 , wherein the getter module comprises a slidable tray, the slidable tray being adapted to slide into and out of the housing for access to and replacement of the getter material.

6. The container assembly of claim 1 , wherein the getter material comprises any one of a desiccant, a physiosoptive media, a chemisorptive media, a particulate filter media, and combinations thereof.

7. The container assembly of claim 2 , wherein the container exterior is substantially curved and the getter module is substantially flat, the opening in the container being substantially tapered in cross section to sealingly accommodate the connection structure of the container.

8. A getter cartridge, comprising:

a substantially rigid housing defining at least one access opening;

a getter material supported within the housing;

a filter disposed in the substantially rigid housing and positioned at the at least one passageway, the filter including a filter housing containing a filter material, the housing defining windows therein; and

a connection structure adapted to secure the getter cartridge to the exterior surface of a back wall of a substrate container, such that getter material supported within the housing and the filter is exposed to an interior of the substrate container.

9. The getter cartridge of claim 8 , wherein the connection structure defines the at least one passageway and is adapted for sealing to an opening in the substrate container to provide fluid communication between the interior of the substrate container and the getter material in the cartridge.

10. The getter cartridge of claim 8 , wherein the connection structure further comprises a mounting tab adapted for securement to the structure on the exterior of the front opening wafer container.

Assignments (4)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 23, 2020
From: KING, JEFFREY J.; FULLER, MATTHEW A.
To: ENTEGRIS, INC.
Reel/Frame 052193/0146 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
Continuity (2)
Provisional Application 62160467 · May 12, 2015
Related Publication 20180138065A1 · May 17, 2018
Cited By (1)
US 12,424,472