Patent Application
Provisional
App. No. 62/672,938
· Confirmation No. 5492
CONDITIONER FOR CHEMICAL-MECHANICAL-PLANARIZATION PAD AND RELATED METHODS
Applicant:
Entegris, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-07-09 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2018-07-03 | PA.. |
Power of Attorney | 1 | View | |
| 2018-07-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2018-07-03 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2018-05-24 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-05-17 | PA.. |
Power of Attorney | 1 | View | |
| 2018-05-17 | SPEC |
Specification | 15 | View | |
| 2018-05-17 | CLM |
Claims | 3 | View | |
| 2018-05-17 | ABST |
Abstract | 1 | View | |
| 2018-05-17 | DRW.NONBW |
Drawings-other than black and white line drawings | 4 | View | |
| 2018-05-17 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-05-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-05-17 | ADS |
Application Data Sheet | 9 | View | |
| 2018-05-17 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2018-05-17 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2018-05-17 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2018-05-17 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Rajesh Tiwari
Chelmsford, MA
Conrad Suriaga
Andover, MA
Bruce Arrington
Bridgeport, TX
Patrick Doering
Holliston, MA
Andrew Allan Galpin
Westford, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 144034
- Docket No.
- 201600115 US PRV
- Confirmation No.
- 5492
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-01-02
SECURITY INTEREST
Recorded 2018-11-13
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Quick Facts
- App. No.
- 62/672,938
- Filed
- 2018-05-17
External Links