Articles coated with fluoro-annealed films
Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium.
1. An article, comprising:
a vacuum compatible substrate;
a protective film overlying at least a portion of the substrate, the film comprising a fluorinated metal oxide containing yttrium wherein the film contains fluorine at a depth of at least 0.1 micron and is a graded film having a fluorine concentration that decreases over the depth of the film from an outer portion to an inner portion,
wherein the film includes rhombohedral or tetragonal Y a O b F c where c/(a+b) 0.04˜0.67 or Y e Al f O g F h , where h/(e+f+g)=0.05-0.54.
2. The article of claim 1 , wherein the protective film is yttrium oxyfluoride or yttrium aluminum oxyfluoride.
3. The article of claim 1 , wherein the film is a graded film, the fluorine content of the film decreasing over a thickness of the film from an outer portion that is yttrium oxyfluoride to an inner portion that is yttria.
4. The article of claim 1 , wherein an outer portion of the film from about 1 micron to about 2 microns thick is yttrium oxyfluoride and a remaining portion of the film is yttria.
5. The article of claim 1 , wherein the film is a graded film, the fluorine content of the film decreasing over a thickness of the film from an outer portion that is yttrium aluminum oxyfluoride to an inner portion that is yttrium aluminum oxide.
6. The article of claim 1 , wherein the film includes yttrium aluminum oxide (Y o Al p O q ), where o/(p+q)=0.03˜0.18, can convert to yttrium aluminum oxyfluoride (Y e Al f O g F h ), where h/(e+f+g)=0.05˜0.54.
7. The article of claim 6 , wherein an outer portion of the film from about 1 micron to about 2 microns thick is yttrium aluminum oxyfluoride and a remaining portion of the film is yttrium aluminum oxide.
8. The article of claim 1 , wherein the film is about 1 micron to about 15 microns thick.
9. The article of claim 1 , wherein the film adheres to the substrate after 5 or more minutes in contact with or submerged in 5% aqueous hydrochloric acid at room temperature.
10. The article of claim 1 , wherein the vacuum compatible substrate is quartz, alumina, aluminum, steel, metal, metal alloy, ceramic, polyether ether ketone, or polyamide.
11. The article of claim 1 , wherein the substrate is a component in a semiconductor manufacturing system.
12. The article of claim 11 , wherein the vacuum compatible substrate is a chamber, chamber component, wafer susceptor, chuck, showerhead, liner, ring, nozzle, baffle, fastener, or wafer transport component.
13. The article of claim 1 wherein the film contains fluorine at a depth of at least 1 micron.
14. The article of claim 1 , wherein the protective film contains yttrium, oxygen and fluorine, the film having:
a yttrium content of between 23 atomic percent and 38 atomic percent determined by EDS;
a fluorine content of between 4 atomic percent and 40 atomic percent;
an oxygen content of between 59 atomic percent and 69.5 atomic percent.
15. The article of claim 8 , wherein the film is at least 3 microns thick.
16. The article of claim 3 , wherein the yttria has a cubic crystal structure.