Cleaning compositions
View Patent ↗An aqueous cleaning composition comprising an alkanolamine, a tetraalkylammonium hydroxide, nonmetallic fluoride salt, a corrosion inhibitor, e.g. ascorbic acid or its derivatives alone or in combination, balance water. Such cleaning compositions are effective to remove residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures with little corrosion of copper and attack of dielectric substrates.
1. A method for post-etch ash cleaning a semiconductor device having an organic, metal organic polymer, inorganic salt, oxide, hydroxide, and/or complexes or combinations thereof as a film or residue comprising the steps of:
contacting said semiconductor device with a cleaning composition containing from about 4 to 14% by weight monoethanolamine, from about 0.2 to 6.0% by weight tetralkylammonium hydroxide, from about 0.3 to 3.5% by weight fluoride ion resulting from ionization of a salt of a non-metallic fluoride compound in said composition, 0.5 to 10% by weight of ascorbic acid corrosion inhibitor, balance water at a temperature of between 25° C. and 50° C. for a period of time between 5 minutes and 60 minutes;
washing said semiconductor device in deionized water; and
drying said semiconductor device.
2. A method according to claim 1 , including the step of including from 1 to 5% by weight ascorbic acid in said cleaning composition.