Transportable container including an internal environment monitor
View Patent ↗A system is disclosed allowing non-invasive, continuous local and remote sensing of the internal environmental characteristics of transportable containers. The system utilizes a variety of sensors inside the container to sense internal environmental conditions.
1. A SMIF pod having an internal environment isolated from ambient atmospheric conditions, the SMIF pod comprising:
a shell portion having one of a bottom opening and a front opening;
a door to sealing close the one of the bottom opening and the front opening;
one of a plurality of wafer shelves mounted within the shell portion to receive a plurality of wafers horizontally and a wafer cassette seatable on the door, the wafer cassette configured to receive a plurality of wafers horizontally, the wafers received intermediate processing steps for manufacturing the wafers into semiconductors;
a plurality of sensors, each sensor monitoring an internal environmental condition within said SMIF pod;
a transceiver in communication with said plurality of sensors, receiving and transmitting said data transmitted by said plurality of sensors; and
a power supply, providing power to said at least one sensor and said transceiver.
2. The SMIF pod of claim 1 , wherein at least one of said sensors in said plurality of sensors is selected from a group comprising:
a temperature sensor;
a humidity sensor; and
an accelerometer sensor.
3. The SMIF pod of claim 1 , wherein at least one of said plurality of sensors includes a plurality of sensor inputs, mounted with said internal portion of said container at distinct locations, sensing an internal environmental condition within said container at said respective distinct locations.
4. The SMIF pod of claim 1 , wherein said communication between said plurality of sensors and said transceiver is performed over a network bus.
5. A SMIF pod sensor network, for monitoring internal environmental conditions within a SMIF pod, comprising:
a shell portion having one of a bottom opening and a front opening;
a door to sealing close the one of the bottom opening and the front opening:
one of a plurality of wafer shelves mounted within the shell portion to receive a plurality of wafers horizontally and a wafer cassette seatable on the door, the wafer cassette configured to receive a plurality of wafers horizontally, the wafers received intermediate processing steps for manufacturing the wafers into semiconductors;
a network bus;
a transceiver, connected with said network bus;
a plurality of network nodes, connected with said network bus; and
a plurality of sensors, connected with said network nodes, wherein said sensors monitor said internal environment conditions within said SMIF pod, and provide data to said network nodes related to said internal environment conditions.
6. The SMIF pod sensor network of claim 5 , wherein said plurality of network nodes are configured as a master-slave network, and wherein said network bus functions as a gateway.
7. The SMIF pod sensor network of claim 5 , wherein said plurality of network nodes are configured as a pier-to-pier network.