Granted Patent
Utility
US 6,767,830
· Confirmation No. 3992
BR2SBCH3 A SOLID SOURCE ION IMPLANT AND CVD PRECURSOR
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-06-08 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2004-03-15 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-15 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-03-15 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-03-15 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-15 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-15 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-03-11 | XT/ |
Extension of Time | 3 | View | |
| 2004-02-23 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-02-23 | CLM |
Claims | 2 | View | |
| 2004-02-23 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-02-23 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-08-26 | CTNF |
Non-Final Rejection | 4 | View | |
| 2003-08-26 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-08-26 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-08-21 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2003-04-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-04-08 | SPEC |
Specification | 1 | View | |
| 2003-04-08 | CLM |
Claims | 2 | View | |
| 2003-04-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-04-08 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-01-29 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-01-21 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2003-01-21 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2003-01-21 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-01-21 | TRNA |
Transmittal of New Application | 5 | View | |
| 2003-01-21 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-12-16 | OATH |
Oath or Declaration filed | 4 | View | |
| 2002-08-07 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-08-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-08-07 | FWCLM |
Index of Claims | 1 | View | |
| 2002-08-07 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-08-07 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-08-07 | SPEC |
Specification | 11 | View | |
| 2002-08-07 | CLM |
Claims | 3 | View | |
| 2002-08-07 | ABST |
Abstract | 1 | View | |
| 2002-08-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-08-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-08-07 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-08-07 | SPEC |
Specification | 11 | View | |
| 2002-08-07 | CLM |
Claims | 3 | View | |
| 2002-08-07 | ABST |
Abstract | 1 | View | |
| 2002-08-07 | DRW |
Drawings-only black and white line drawings | 5 | View |
Inventors
Ziyun Wang
New Milford, CT
Chongying Xu
New Milford, CT
Thomas H. Baum
New Fairfield, CT
Michael A. Todd
Phoenix, AZ
Niamh McMahon
Binningen, IRELAND
Attorneys & Agents of Record
Classification
USPC
438/681
C23C16/301
H10P14/3442
H10P14/3422
H10P14/24
H10P14/2905
H10P14/3421
H10P14/2922
H10P14/3411
H10P14/3414
C07F9/90
Prosecution
- Examiner
- NAZARIO GONZALEZ, PORFIRIO
- Art Unit
- 1621
- Customer No.
- 25559
- Docket No.
- ATMI-581
- Confirmation No.
- 3992
Publication
- Pub. No.
- US20040029367A1
- Pub. Date
- 2004-02-12
Patent Term Adjustment
-523days
No related applications found.
from
CMC MATERIALS, INC.,
ENTEGRIS GP, INC.,
ENTEGRIS, INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
POCO GRAPHITE, INC.,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY INTEREST
Recorded 2022-07-08
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-04
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-12-23
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Quick Facts
- Patent No.
- US 6,767,830
- App. No.
- 10/213,669
- Filed
- 2002-08-07
- Granted
- 2004-07-27
- Pub. No.
- US20040029367A1
- Examiner
- NAZARIO GONZALEZ, PORFIRIO
- Art Unit
- 1621
- PTA
- -523 days
External Links