IP Library Granted Patent US 8,221,532
Granted Patent B2
US 8,221,532 · App. 12/984,216 · Granted Jul 17, 2012

Nanoporous articles and methods of making same

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Quick Facts
Patent No.
US 8,221,532
App. No.
12/984,216
Granted
Jul 17, 2012
Kind
B2
Abstract

An adsorbent having porosity expanded by contact with a first agent effecting such expansion and a pressurized second agent effecting transport of the first agent into the porosity, wherein the adsorbent subsequent to removal of the first and second agents retains expanded porosity. The adsorbent can be made by an associated method in which materials such as water, ethers, alcohols, organic solvent media, or inorganic solvent media can be utilized as the first agent for swelling of the porosity, and helium, argon, krypton, xenon, neon, or other inert gases can be employed as the pressurized second agent for transport of both agents into the porosity of the adsorbent, subsequent to which the agents can be removed to yield an adsorbent of increased capacity for sorbable fluids, e.g., organometallic compounds, hydrides, halides and acid gases. Also described is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone.

Claims (18)

1. A gas supply package, comprising a vessel, a valve head assembly coupled to the vessel, and a carbon adsorbent in an interior volume of the vessel, wherein the carbon adsorbent having porosity expanded by contact with a first agent effecting such expansion and a pressurized second agent effecting transport of the first agent into said porosity, wherein the adsorbent subsequent to removal of said first and second agents retains expanded porosity, and wherein the gas supply package is characterized by at least one of the features of:

(i) the carbon adsorbent being in the form of multiple monolithic adsorbent articles in a stacked arrangement, and the vessel having a positional stabilization structure in the interior volume to retain the monolithic adsorbent articles in position and restrain their movement in relation to one another and in relation to the vessel; and

(ii) an electrical power assembly arranged to input electrical energy to the carbon adsorbent for resistive and/or inductive heating thereof to effect desorption of fluid from the carbon adsorbent.

2. The gas supply package of claim 1 , further comprising a fluid adsorbed on the carbon adsorbent.

3. The gas supply package of claim 2 , wherein the fluid comprises a fluid selected from the group consisting of organometallic compounds, hydrides, halides and acid gases.

4. The gas supply package of claim 1 , characterized by at least feature (i).

5. The gas supply package of claim 1 , characterized by at least feature (ii).

6. The gas supply package of claim 1 , characterized by both feature (i) and feature (ii).

7. The gas supply package of claim 4 , wherein the positional stabilization structure comprises structure selected from the group consisting of packings, fixture plates, resilient compression elements, screens, bags, adsorbent article configurations, and vessel interior wall conformations.

8. The gas supply package of claim 4 , wherein the positional stabilization structure comprises the adsorbent articles being formed to engage one another, to positionally fix them in the stacked arrangement.

9. The gas supply package of claim 4 , wherein the positional stabilization structure comprises longitudinal ribs on interior wall surface of the vessel.

10. The gas supply package of claim 2 , wherein said fluid comprises a halide fluid.

11. The gas supply package of claim 10 , wherein said halide fluid comprises a halide selected from the group consisting of boron trifluoride, diborane, boron trichloride, phosphorus trifluoride, arsenic pentafluoride, silicon tetrachloride, and germanium tetrafluoride.

12. The gas supply package of claim 10 , wherein said halide fluid comprises boron trifluoride.

13. The gas supply package of claim 1 , wherein the adsorbent has a loading capacity measured for boron trifluoride that is from 35% to 50% higher than loading capacity of a corresponding adsorbent not contacted with said first and second agents.

14. The gas supply package of claim 13 , characterized by at least feature (i).

15. The gas supply package of claim 13 , characterized by at least feature (ii).

16. The gas supply package of claim 13 , characterized by both features (i) and (ii).

Assignments (8)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2015
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: ENTEGRIS, INC.
Reel/Frame 034894/0025 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →