IP Library Granted Patent US 7,100,772
Granted Patent B2
US 7,100,772 · App. 10/989,232 · Granted Sep 5, 2006

Wafer container with door actuated wafer restraint

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Quick Facts
Patent No.
US 7,100,772
App. No.
10/989,232
Granted
Sep 5, 2006
Kind
B2
Abstract

A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.

Claims (27)

1. The combination of a wafer and a container for holding the wafer wherein the container comprises:

an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame;

a door sealingly engagable in the door frame to close the open front; and

a wafer restraint system in the enclosure comprising at least one fixed wafer restraint portion and at least one operable wafer restraint portion, the operable wafer restraint portion being selectively shiftable with the door between a first position wherein the operable wafer restraint portion is positioned to enable the wafer to be inserted and removed from the container, and a second position wherein, when the wafer is received in the fixed wafer restraint portion, the operable wafer restraint portion is engaged with and restrains the wafer, the wafer restraint system including a generally c-shaped wafer support having a pair of opposing branches, each branch having a first end fixedly coupled to the back of the enclosure portion and a second opposing end cantilevered therefrom, each branch further including a forward wafer engaging portion proximate the second end, the wafer restraint system further including an actuator disposed so as to engage and urge the second ends of the branches inwardly when the door is engaged with the enclosure portion.

2. The combination of claim 1 , wherein the actuator comprises a guide operably coupled with the enclosure portion and a piston slidably disposed in the guide.

3. The combination of claim 2 , wherein the piston includes a head portion disposed so as to be engagable with the door and wherein the actuator further comprises a return spring disposed to exert a biasing force resisting movement of the head portion toward the guide.

4. The combination of claim 3 , wherein the piston includes a wedge shaped wafer support engaging portion opposite the head.

5. The combination of claim 1 , wherein the actuator comprises a projection on the door.

6. The combination of claim 1 , wherein the operable wafer restraint portion comprises an arm pivotally coupled with the enclosure portion.

7. A container for holding a wafer comprising:

an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame;

a door sealingly engagable in the door frame to close the open front;

a wafer restraint system in the enclosure including a generally c-shaped wafer support having a pair of opposing branches, each branch having a first end fixedly coupled to the back of the enclosure portion and a second opposing end cantilevered therefrom, the branches positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame, each branch further including a forward wafer engaging portion proximate the second end, the wafer restraint system further including means for urging the second ends of the branches inwardly when the door is engaged with the enclosure portion.

8. The container of claim 7 , wherein the means for urging the second ends of the branches inwardly when the door is engaged with the enclosure portion includes an actuator.

9. The container of claim 8 , wherein the actuator comprises a guide operably coupled with the enclosure portion and a piston slidably disposed in the guide.

10. The container of claim 9 , wherein the piston includes a head portion disposed so as to be engagable with the door and wherein the actuator further comprises a return spring disposed to exert a biasing force resisting movement of the head portion toward the guide.

11. The container of claim 10 , wherein the piston includes a wedge shaped wafer support engaging portion opposite the head.

12. The container of claim 8 , wherein the actuator comprises a projection on the door.

13. The combination of a plurality of wafers and a container for holding the wafers in an axially aligned, generally parallel spaced apart arrangement, the container comprising:

an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame;

a door sealingly engagable in the door frame to close the open front; and

a wafer restraint system in the enclosure comprising a plurality of fixed wafer restraint portions and a plurality of corresponding operable wafer restraint portions, the operable wafer restraint portions being selectively shiftable with the door between a first position wherein the operable wafer restraint portions are positioned to enable the wafers to be inserted and removed from the container, and a second position wherein, when the wafers are received in the fixed wafer restraint portions, the operable wafer restraint portions are engaged with and restraining the wafers, the wafer restraint system including a plurality of generally c-shaped wafer supports having a pair of opposing branches, each branch having a first end fixedly coupled to the back of the enclosure portion and a second opposing end cantilevered therefrom, each branch further including a forward wafer engaging portion proximate the second end, the wafer restraint system further including an actuator for each branch disposed so as to engage and urge the second ends of the branches inwardly when the door is engaged with the enclosure portion.

14. The combination of claim 13 , wherein each actuator comprises a guide operably coupled with the enclosure portion and a piston slidably disposed in the guide.

15. The combination of claim 14 , wherein each piston includes a head portion disposed so as to be engagable with the door and wherein each actuator further comprises a return spring disposed to exert a biasing force resisting movement of the head portion toward the guide.

16. The combination of claim 15 , wherein the piston includes a wedge shaped wafer support engaging portion opposite the head.

17. The combination of claim 13 , wherein each actuator comprises a projection on the door.

18. The combination of claim 13 , wherein the operable wafer restraint portions comprise an arm pivotally coupled with the enclosure portion.

Assignments (11)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Feb 10, 2009
From: ENTEGRIS, INC. (MINNESOTA CORPORATION)
To: ENTEGRIS, INC. (DELAWARE CORPORATION)
Reel/Frame 022228/0618 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 9, 2005
From: BURNS, JOHN; FULLER, MATTHEW A.; KING, JEFFREY J.; FORBES, MARTIN L.; SMITH, MARK V.
To: ENTEGRIS, INC.
Reel/Frame 015664/0906 →