Granted Patent
Utility
US 6,599,870
· Confirmation No. 7669
BORIC ACID CONTAINING COMPOSITIONS FOR STRIPPING RESIDUES FROM SEMICONDUCTOR SUBSTRATES
Inventors
Attorneys & Agents of Record
Classification
USPC
510/175
G03F7/425
C11D2111/22
H10P70/273
H10P76/204
H10P70/15
H10P50/242
H10P50/283
G03F7/095
G03F7/423
G03F7/426
G03F7/427
Prosecution
- Examiner
- WEBB, GREGORY E
- Art Unit
- 1751
- Customer No.
- 25559
- Docket No.
- ATMI-399-CON-DIV.
- Confirmation No.
- 7669
Publication
- Pub. No.
- US20030040447A1
- Pub. Date
- 2003-02-27
Patent Term Adjustment
0days
Parent
is a Division of
→
App. 09/801,543
· US 6,492,310
Filed 2001-03-07
· Patented Case
Parent
is a Continuation of
→
App. 09/312,933
· US 6,306,807
Filed 1999-05-17
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
Claims priority from a provisional application
→
App. 60/085,879
Filed 1998-05-18
· Provisional Application Expired
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-12-19
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
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Quick Facts
- Patent No.
- US 6,599,870
- App. No.
- 10/179,867
- Filed
- 2002-06-25
- Granted
- 2003-07-29
- Pub. No.
- US20030040447A1
- Examiner
- WEBB, GREGORY E
- Art Unit
- 1751
- PTA
- 0 days
External Links