Isotopically-enriched boron-containing compounds, and methods of making and using same
View Patent ↗An isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein at least one of the boron atoms contains a desired isotope of boron in a concentration or ratio greater than a natural abundance concentration or ratio thereof. The compound may have a chemical formula of B 2 F 4 . Synthesis methods for such compounds, and ion implantation methods using such compounds, are described, as well as storage and dispensing vessels in which the isotopically-enriched, boron-containing compound is advantageously contained for subsequent dispensing use.
1. A beam-line ion implantation, plasma immersion ion implantation or plasma doping system, comprising a source of a boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein the compound contains a boron isotope in a concentration or ratio greater than a natural abundance concentration or ratio thereof.
2. The system of claim 1 , comprising a conduit adapted for delivery of the compound to an ionization chamber, wherein the conduit is maintained at a temperature effective to suppress clogging of the conduit and/or decomposition of the compound in the conduit, optionally wherein at least one of the conduit and an ionization chamber of the system is actively cooled.
3. A gas storage and dispensing vessel holding a boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein the compound contains a boron isotope in a concentration or ratio greater than a natural abundance concentration or ratio thereof.
4. A method of improving beam current for an ion implantation process, comprising: flowing a boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein the compound contains a boron isotope in a concentration or ratio greater than a natural abundance concentration or ratio thereof; and generating an ion beam from the compound.
5. A method of synthesizing a boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein the compound contains a boron isotope in a concentration or ratio greater than a natural abundance concentration or ratio thereof, comprising contacting a boron-containing gas with a boron-containing solid, wherein at least one of the boron-containing gas and boron-containing solid is isotopically-enriched beyond a natural abundance in atomic mass 10 boron isotope or in atomic mass 11 boron isotope.
6. The method of claim 5 , wherein the compound is B 2 F 4 and the boron-containing gas is BF 3 .
7. An ion implantation method, comprising flowing a a boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein the compound contains a boron isotope in a concentration or ratio greater than a natural abundance concentration or ratio thereof, to an ion implantation tool with at least one co-flowed species selected from the group consisting of inert gas, argon, nitrogen, helium, hydrogen, ammonia, xenon, xenon difluoride, isotopically-enriched diborane, and natural abundance diborane.
8. An ion implantation method, comprising flowing B 2 F 4 isotopically enriched in atomic mass 11 boron, to an ion implantation tool with BF 3 isotopically enriched in atomic mass 11 boron.
9. An ionized composition useful for AMU separation to generate ionic species for ion implantation, said composition deriving from a boron precursor compound comprising two or more boron atoms and at least one fluorine atom, wherein the compound contains a boron isotope in a concentration or ratio greater than a natural abundance concentration or ratio thereof, wherein said boron precursor compound is isotopically enriched beyond natural abundance of 10 B or 11 B, and wherein said composition comprises one or more species selected from the group consisting of B 2 F 4 + , B 2 F 3 + , B 2 F 2 + , BF 3 + , BF 2 +, BF + , B + , F + , B 2 F 4 ++, B 2 F 3 ++, B 2 F 2 ++, BF 3 ++, BF 2 ++ , BF ++ , B ++ , F ++ , B 2 F 4 +++ , B 2 F 3 +++ , B 2 F 2 +++ , BF 3 +++ , BF 2 +++ , BF +++ , B +++ , and F +++ , the boron-containing ones of which are isotopically-enriched beyond natural abundance of 10 B or 11 B.
10. A method of improving beam current for an ion implantation process, comprising ionizing an isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein the compound contains a boron isotope in a concentration or ratio greater than a natural abundance concentration or ratio thereof, to form isotopically-enriched ionic species producing such improved beam current, in relation to a corresponding non-isotopically-enriched, boron-containing compound.