Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition
View Patent ↗A liquid removal composition and process for removing sacrificial anti-reflective coating (SARC) material from a substrate having same thereon. The liquid removal composition includes at least one fluoride-containing compound, at least one organic solvent, optionally water, and optionally at least one chelating agent. The composition achieves at least partial removal of SARC material in the manufacture of integrated circuitry with minimal etching of metal species on the substrate, such as aluminum, copper and cobalt alloys, and without damage to low-k dielectric materials employed in the semiconductor architecture.
1. A liquid removal composition, consisting of about 0.35 wt % to about 0.75 wt % of at least one fluoride-containing compound, about 8.5 wt % to about 73.5 wt % of at least one alcohol, about 25 wt % to about 90 wt % of at least one glycol, and about 0.35 wt % to about 0.8 wt % of water, based on the total weight of the composition, wherein the at least one alcohol is selected from the group consisting of 1-propanol, 2-propanol, 1-butanol, 2-butanol, t-butanol, 1-pentanol, and combinations thereof, wherein the at least one glycol is selected from the group consisting of 1,4-butanediol, neopentyl glycol, and combinations thereof, and wherein said liquid removal composition is useful for removing sacrificial anti-reflective coating (SARC) materials and post-etch residue from a microelectronic device having such materials and residue thereon.
2. The liquid removal composition of claim 1 , wherein the at least one alcohol is selected from the group consisting of 1-butanol, 2-butanol, t-butanol, 1-pentanol, and combinations thereof.
3. The liquid removal composition of claim 1 , wherein the at least one fluoride-containing compound is selected from the group consisting of hydrogen fluoride, ammonium fluoride, triethanolamine hydrofluoric acid salt, ammonium bifluoride, tetraalkylammonium bifluorides ((R) 4 NHF 2 ), and combinations thereof, wherein R is selected from the group consisting of methyl, ethyl, propyl, butyl, phenyl, benzyl, and fluorinated C 1 -C 4 alkyl groups.
4. The liquid removal composition of claim 1 , wherein the at least one alcohol is 1-butanol.
5. The liquid removal composition of claim 1 , wherein the at least one glycol is 1,4-butanediol.
6. The liquid removal composition of claim 1 , consisting of 1-butanol, 1,4-butanediol, hydrogen fluoride, and water.
7. The liquid removal composition of claim 1 , wherein the pH of the composition is in a range from about 1 to about 5.
8. A method of removing SARC material and/or post-etch residue from a microelectronic device having said material and residue thereon, said method comprising contacting the microelectronic device with a liquid removal composition for sufficient time to at least partially remove said material and residue from the microelectronic device, and wherein the liquid removal composition consists of about 0.35 wt % to about 0.75 wt % of at least one fluoride-containing compound, about 8.5 wt % to about 73.5 wt % of at least one alcohol, about 25 wt % to about 90 wt % of at least one glycol, and about 0.35 wt % to about 0.8 wt % of water, based on the total weight of the composition, wherein the at least one alcohol is selected from the group consisting of 1 propanol, 2-propanol, 1-butanol, 2-butanol, t-butanol, 1-pentanol, and combinations thereof, and wherein the at least one glycol is selected from the group consisting of 1,4-butanediol, neopentyl glycol, and combinations thereof.
9. The method of claim 8 , wherein the at least one alcohol is selected from the group consisting of 1-butanol, 2-butanol, t-butanol, 1-pentanol, and combinations thereof.
10. The method of claim 8 , wherein said contacting is carried out for a time of from about 1 minute to about 60 minutes.
11. The method of claim 8 , wherein said contacting is carried out at temperature in a range of from about 20° C. to about 80° C.
12. The method of claim 8 , wherein the at least one fluoride-containing compound is selected from the group consisting of hydrogen fluoride, ammonium fluoride, triethanolamine hydrofluoric acid salt, ammonium bifluoride, tetraalkylammonium bifluorides ((R) 4 NHF 2 ), and combinations thereof, wherein R is selected from the group consisting of methyl, ethyl, propyl, butyl, phenyl, benzyl, and fluorinated C 1 -C 4 alkyl groups.
13. The method of claim 8 , wherein the pH of the composition is in a range from about 1 to about 5.
14. The method of claim 8 , further comprising rinsing the microelectronic device with deionized water following contact with the liquid removal composition.