Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
An ion implantation system and process, in which the performance and lifetime of the ion source of the ion implantation system are enhanced, by utilizing isotopically enriched dopant materials, or by utilizing dopant materials with supplemental gas(es) effective to provide such enhancement.
1. A packaged gas mixture for use in ion implantation, comprising a gas mixture including boron trifluoride gas, xenon, and hydrogen, and a gas storage and dispensing vessel storing the gas mixture, wherein the boron trifluoride is isotopically enriched above natural abundance level of a boron isotope, and wherein the hydrogen gas in present in an amount that is effective in the gas mixture to improve the lifetime and performance of an ion source, as compared to a corresponding gas mixture lacking the hydrogen gas.
2. The packaged gas mixture of claim 1 , wherein the vessel contains a sorbent medium for gas storage.
3. The packaged gas mixture of claim 2 , wherein the sorbent medium comprises a carbon adsorbent.
4. The packaged gas mixture of claim 1 , wherein the vessel comprises an internally pressure-regulated vessel.
5. The packaged gas mixture of claim 4 , wherein the vessel contains a pressure regulator in an internal volume of the vessel.
6. The packaged gas mixture of claim 4 , wherein the vessel contains more than one pressure regulator in an internal volume of the vessel.
7. An ion implantation process, comprising:
flowing the gas mixture from a packaged gas mixture of claim 1 to an ion source;
generating ionic dopant species from the gas mixture at the ion source; and
implanting the ionic dopant species in a substrate.
8. The ion implantation process of claim 7 , wherein the substrate is implanted for manufacture of microelectronic devices, microelectronic device precursor components, displays, or solar panels.
9. The ion implantation process of claim 7 , wherein the substrate comprises a microelectronic device substrate.
10. The ion implantation process of claim 7 , wherein the substrate comprises a silicon, silicon carbide, or gallium nitride substrate.
11. The ion implantation process of claim 7 , wherein the vessel contains a sorbent medium for gas storage.
12. The ion implantation process of claim 11 , wherein the sorbent medium comprises a carbon adsorbent.
13. The ion implantation process of claim 7 , wherein the vessel is internally pressure-regulated.
14. The ion implantation process of claim 13 , wherein the vessel contains a pressure regulator in an internal volume of the vessel.
15. The ion implantation process of claim 13 , wherein the vessel contains more than one pressure regulator in an internal volume of the vessel.
16. A method for enhancing operation of an ion implantation system, comprising flowing to the ion implantation system the gas mixture from the packaged gas mixture according to claim 1 , ionizing said gas mixture in the ion implantation system to generate ionic boron dopant species from ion implantation, and ion implanting the ionic boron dopant species.
17. The method of claim 16 , wherein the vessel contains a sorbent medium for gas storage.
18. The method of claim 17 , wherein the sorbent medium comprises a carbon adsorbent.
19. The method of claim 16 , wherein the vessel is internally pressure-regulated.
20. The method of claim 19 , wherein the vessel contains a pressure regulator in an internal volume of the vessel.
21. The method of claim 19 , wherein the vessel contains more than one pressure regulator in an internal volume of the vessel.