IP Library Granted Patent US 8,153,434
Granted Patent B2
US 8,153,434 · App. 13/204,488 · Granted Apr 10, 2012

Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness and method of making same

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Quick Facts
Patent No.
US 8,153,434
App. No.
13/204,488
Granted
Apr 10, 2012
Kind
B2
Abstract

A fluid storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise associated with a colorimetric agent undergoing color change in exposure to fluid leaking from the vessel. Such shrink-wrap film may be applied to a portion of the vessel susceptible to leakage, or alternatively to the entire vessel, so that the film is colorimetrically effective to indicate the occurrence of a leakage event by visually perceptible change of color.

Claims (30)

1. A fluid storage and dispensing apparatus comprising a fluid storage and dispensing vessel adapted to hold a fluid for dispensing at low pressure, said vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, wherein said vessel in an interior volume thereof contains (i) a solid-phase physical adsorbent material having sorptive affinity for said fluid or (ii) a pressure regulator assembly arranged for said dispensing at low pressure, said vessel further comprising a clear or translucent shroud that is circumferentially sealed to an exterior surface of the vessel, overlying the neck portion of the vessel and the valve head assembly to define an interior volume enclosed by the shroud, wherein the enclosed interior volume surrounds the neck portion and valve head assembly, and a colorimetric material in the enclosed interior volume that is colorimetrically sensitive to fluid held in the vessel for dispensing, whereby leakage of said fluid at said neck portion and/or valve head assembly is confined by the enclosed interior volume and effects a color change in the colorimetric material that is visually perceptible through the shroud upon occurrence of a leakage event.

2. The fluid storage and dispensing apparatus of claim 1 , wherein the fluid storage and dispensing vessel contains a solid-phase physical adsorbent material.

3. The fluid storage and dispensing apparatus of claim 1 , wherein the fluid storage and dispensing vessel contains a pressure regulator assembly arranged for said dispensing at low pressure.

4. The fluid storage and dispensing apparatus of claim 1 , wherein said fluid storage and dispensing vessel contains a semiconductor manufacturing reagent.

5. The fluid storage and dispensing apparatus of claim 4 , wherein said semiconductor manufacturing reagent comprises a reagent selected from the group consisting of hydride reagents, halide reagents, and organometallic reagents.

6. The fluid storage and dispensing apparatus of claim 1 , wherein the colorimetric material comprises a colorimetric agent associated with a sheet-form element.

7. The fluid storage and dispensing apparatus of claim 6 , wherein the sheet-form element is impregnated with the colorimetric agent.

8. The fluid storage and dispensing apparatus of claim 1 , wherein the colorimetric material is mounted on the fluid storage and dispensing vessel.

9. The fluid storage and dispensing apparatus of claim 1 , wherein the colorimetric material is mounted on a valve head of the fluid storage and dispensing vessel.

10. The fluid storage and dispensing apparatus of claim 1 , wherein the shroud comprises a polymeric film material.

11. The fluid storage and dispensing apparatus of claim 10 , wherein the polymeric film material is selected from the group consisting of polyethylene, polyolefin, polyvinylchloride and polyester.

12. The fluid storage and dispensing apparatus of claim 1 , wherein the shroud comprises a shrink-wrap film material.

13. The fluid storage and dispensing apparatus of claim 1 , wherein the fluid storage and dispensing vessel contains a fluoride gas.

14. The fluid storage and dispensing apparatus of claim 1 , wherein the fluid storage and dispensing vessel contains an acid gas.

15. The fluid storage and dispensing apparatus of claim 1 , wherein the colorimetric material comprises a colorimetric agent selected from the group consisting of iron oxide, copper sulfate, copper hydroxide, copper carbonate, pH indicating solutions, copper sulfate, copper hydroxide, copper carbonate, and iron oxide.

16. A method of fluid storage, comprising storing a fluid in a fluid storage and dispensing vessel adapted to hold a fluid for dispensing at low pressure, said vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, wherein said vessel in an interior volume thereof contains (i) a solid-phase physical adsorbent material having sorptive affinity for said fluid or (ii) a pressure regulator assembly arranged for said dispensing at low pressure, and maintaining an enclosed interior volume surrounding the neck portion and the valve head assembly within a clear or transparent shroud circumferentially sealed to an exterior surface of the vessel and containing a colorimetric material in the enclosed interior volume that is colorimetrically sensitive to fluid held in the vessel for dispensing, whereby leakage of said fluid at said neck portion and/or valve head assembly is confined by the enclosed interior volume and effects a color change in the colorimetric material that is visually perceptible through the shroud upon occurrence of a leakage event.

17. The method of claim 16 , wherein the fluid storage and dispensing vessel contains a solid-phase physical adsorbent material.

18. The method of claim 16 , wherein the fluid storage and dispensing vessel contains a pressure regulator assembly arranged for said dispensing at low pressure.

19. The method of claim 16 , wherein said fluid in the storage and dispensing vessel comprises a semiconductor manufacturing reagent.

20. The method of claim 19 , wherein said semiconductor manufacturing reagent comprises a reagent selected from the group consisting of hydride reagents, halide reagents, and organometallic reagents.

21. The method of claim 16 , wherein the colorimetric material comprises a colorimetric agent associated with a sheet-form element.

22. The method of claim 21 , wherein the sheet-form element is impregnated with the colorimetric agent.

23. The method of claim 16 , wherein the colorimetric material is mounted on the fluid storage and dispensing vessel.

24. The method of claim 16 , wherein the colorimetric material is mounted on a valve head of the fluid storage and dispensing vessel.

25. The method of claim 16 , wherein the shroud comprises a polymeric film material.

26. The method of claim 25 , wherein the polymeric film material is selected from the group consisting of polyethylene, polyolefin, polyvinylchloride and polyester.

27. The method of claim 16 , wherein the shroud comprises a shrink-wrap film material.

28. The method of claim 16 , wherein the fluid storage and dispensing vessel contains a fluoride gas.

29. The method of claim 16 , wherein the fluid storage and dispensing vessel contains an acid gas.

30. The method of claim 16 , wherein the colorimetric material comprises a colorimetric agent selected from the group consisting of iron oxide, copper sulfate, copper hydroxide, copper carbonate, pH indicating solutions, copper sulfate, copper hydroxide, copper carbonate, and iron oxide.

Assignments (8)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2015
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: ENTEGRIS, INC.
Reel/Frame 034894/0025 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →