Rectangular parallelepiped fluid storage and dispensing vessel
View Patent ↗A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
1. A method of fabricating a gas source package, said method comprising:
introducing a monolithic carbon physical adsorbent material into an interior volume of a metal tube closed at a first end thereof and open at a second end thereof, said monolithic carbon physical adsorbent material comprising multiple monolithic articles, each of cylindrical form, abutting one another in face-to-face contact; and
after introduction of said monolithic carbon physical adsorbent material into the interior volume of said tube, welding a flat top plate member to the second end of the tube to enclose the interior volume, wherein the top plate member has a central opening arranged to leak-tightly engage a fluid dispensing assembly.
2. The method of claim 1 , further comprising securing a fluid dispensing assembly to the top plate member.
3. The method of claim 1 , wherein the monolithic carbon physical adsorbent material is conformed in size and shape to the interior volume of said tube, and occupies from about 75% to about 95% of the interior volume.
4. The method of claim 1 , further comprising introducing gas to the interior volume for adsorption on said monolithic carbon physical adsorbent material.
5. The method of claim 4 , wherein the gas introduced to the interior volume is thereafter stored in the interior volume at subatmospheric pressure.
6. The method of claim 4 , wherein the gas comprises gas selected from the group consisting of arsine, phosphine, hydrogen selenide, hydrogen telluride, nitrogen trifluoride, boron trifluoride, boron trichloride, diborane, trimethylsilane, tetramethylsilane, disilane, silane, germane, and organometallic gaseous reagents.
7. The method of claim 1 , wherein the top plate member comprises an NPT thread to leak-tightly engage the fluid dispensing assembly.
8. The method of claim 7 , further comprising securing a fluid dispensing assembly to the top plate member.
9. The method of claim 1 , further comprising positioning an O-ring around a periphery of the central opening, and fixing in position in the central opening a valve insertion ring, wherein the valve insertion ring includes an upper disc portion from which downwardly depends a plug portion of smaller diameter than the upper disc portion, so that the plug portion fits closely within the central opening of the top plate member, with the O-ring between an underside of the upper disc portion and an upper surface of the top plate member.