IP Library Granted Patent US 9,816,502
Granted Patent B2
US 9,816,502 · App. 14/329,707 · Granted Nov 14, 2017

System and method for pressure compensation in a pump

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Quick Facts
Patent No.
US 9,816,502
App. No.
14/329,707
Granted
Nov 14, 2017
Kind
B2
Abstract

Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.

Claims (24)

1. A non-transitory computer readable medium, comprising instructions executable by a controller for:

receiving a pressure of a fluid in a chamber of a pumping apparatus from a sensor coupled to a pump;

determining if the pressure in the chamber is above a desired pressure;

moving the pump of the pumping apparatus to increase the volume of the chamber to compensate for a pressure increase if the pressure in the chamber is above the desired pressure; and

sending a signal to the pump to dispense fluid from the chamber, wherein the determination and movement are repeated to maintain substantially the desired pressure until the dispense of fluid is initiated.

2. The computer readable medium of claim 1 , wherein the desired pressure is a dispense pressure or a fraction of the dispense pressure.

3. The computer readable medium of claim 1 , wherein dispensing the fluid comprises moving the pump a dispense distance.

4. The computer readable medium of claim 3 , wherein the dispense distance is based on an initial position of the pump or a distance the pump is moved to maintain substantially the desired pressure.

5. The computer readable medium of claim 3 , wherein moving the pump comprises moving a piston of the pump by a motor increment.

6. The computer readable medium of claim 1 , further comprising disabling the sensor during a time window such that the determination and movement are not repeated during the time window.

7. The computer readable medium of claim 1 , further comprising detecting or receiving notice that the pump has completed movement before repeating the determination and movement.

8. A system, comprising:

a pumping apparatus comprising a chamber for receiving a fluid for dispense and a pump within the chamber;

a sensor coupled to the pump to sense a pressure in the chamber; and

a controller coupled to the sensor and configured to:

receive the pressure of the fluid in the chamber of the pumping apparatus from the sensor;

determine if the pressure in the chamber is above a desired pressure;

move the pump of the pumping apparatus to increase the volume of the chamber to compensate for a pressure increase if the pressure in the chamber is above the desired pressure; and

send a signal to the pump to dispense fluid from the chamber, wherein the determination and movement are repeated to maintain substantially the desired pressure until the dispense of fluid is initiated.

9. The system of claim 8 , wherein the desired pressure is a dispense pressure or a fraction of the dispense pressure.

10. The system of claim 8 , wherein moving the pump comprises moving a piston of the pump by a motor increment.

11. The system of claim 8 , wherein dispensing the fluid comprises moving the pump a dispense distance and wherein the dispense distance is based on an initial position of the pump or a distance the pump is moved to maintain substantially the desired pressure.

12. The system of claim 8 , wherein the controller is operable to disable the sensor during a time window such that the determination and movement are not repeated during the time window.

13. The system of claim 8 , wherein the controller is operable to detect or receive notice that the pump has completed movement before repeating the determination and movement.

Assignments (4)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 18, 2014
From: CEDRONE, JAMES; GONNELLA, GEORGE
To: ENTEGRIS, INC.
Reel/Frame 033341/0284 →