In-situ oxidized NiO as electrode surface for high k MIM device
A high dielectric constant metal-insulator structure, including an electrode comprising NiO x wherein 1<x≤1.5, and a high k dielectric material in contact with the electrode. The structure may have a further electrode in contact with the high k dielectric material, to form a metal-insulator-metal (MIM) capacitor, e.g., including a bottom electrode comprising NiO x wherein 1<x≤1.5, a high k dielectric material overlying the bottom electrode, and a top electrode comprising NiO x wherein 1<x≤1.5. The NiO x electrodes in such applications are oxide-stable, high work function electrodes that avoid deterioration of work function and conductivity during electronic device fabrication involving elevated temperature annealing.
1. A high dielectric constant metal-insulator structure, comprising:
an electrode comprising NiO x wherein 1<x<1.5;
a high k dielectric material in contact with the electrode, the high k dielectric material comprising a material selected from the group consisting of Al 2 O 3 , Ta 2 O 3 , Bi—Ta—O, Bi—Nb—O, PbMgNbO 3 +PbTiO 3 , PbLaZrTiO 3 , BaSrTiO 3 , (Ba,Sr)Ti 4 O 9 , Ti—Zr—Sn—O, Ta 2 O 5 , lanthanide-(Ta,Nb)—O, Al—Ta—O, HfO 2 , ZrO 2 , doped HfO 2 , and doped ZrO 2 ; and
a protective cap in direct contact with the electrode, wherein the protective cap is a vapor deposition layer that protects the high dielectric constant metal-insulator structure from deoxygenation or adverse processing effects incident to gas anneals.
2. The high dielectric constant metal-insulator structure of claim 1 , wherein the high k dielectric material has a dielectric constant, k, in a range of from 8 to 24,700.
3. The high dielectric constant metal-insulator structure of claim 1 , disposed on a substrate.
4. The high dielectric constant metal-insulator structure of claim 3 , wherein the substrate comprises a material selected from the group consisting of Si, SiO 2 , sapphire, alumina, diamond, graphene, and TiN.
5. The high dielectric constant metal-insulator structure of claim 1 , wherein the high k dielectric material is in contact with a second electrode.
6. A metal-insulator-metal capacitor, comprising:
a bottom electrode comprising NiO x wherein 1<x<1.5;
a high k dielectric material in contact with the bottom electrode, the high k dielectric material comprising a material selected from the group consisting of Al 2 O 3 , Ta 2 O 3 , Bi—Ta—O, Bi—Nb—O, PbMgNbO 3 +PbTiO 3 , PbLaZrTiO 3 , BaSrTiO 3 , (Ba,Sr)Ti 4 O 9 , Ti—Zr—Sn—O, Ta 2 O 5 , lanthanide-(Ta,Nb)—O, Al—Ta—O, HfO 2 , ZrO 2 , doped HfO 2 , and doped ZrO 2 ;
a top electrode comprising NiO x in contact with the high k dielectric material, wherein 1<x<1.5; and
a protective cap overlying and in direct contact with the top electrode, wherein the protective cap is a vapor deposition layer that protects the capacitor from deoxygenation or adverse processing effects incident to gas anneals.
7. The metal-insulator-metal capacitor of claim 6 , wherein the protective cap comprises alumina.
8. A dielectric and conductive material structure, comprising high k dielectric material in contact with conductive material comprising NiO x wherein 1<x<1.5, the high k dielectric material comprising a material selected from the group consisting of Al 2 O 3 , Ta 2 O 3 , Bi—Ta—O, Bi—Nb—O, PbMgNbO 3 +PbTiO 3 , PbLaZrTiO 3 , BaSrTiO 3 , (Ba,Sr)Ti 4 O 9 , Ti—Zr—Sn—O, Ta 2 O 5 , lanthanide-(Ta,Nb)—O, Al—Ta—O, HfO 2 , ZrO 2 , doped HfO 2 , and doped ZrO 2 , wherein the structure further comprises a protective cap in direct contact with the structure, wherein the protective cap is a vapor deposition layer that protects the structure from deoxygenation or adverse processing effects incident to gas anneals.
9. The dielectric and conductive material structure of claim 8 , wherein the high k dielectric material has a dielectric constant, k, in a range of from 8 to 24,700.
10. A method of forming a high dielectric constant metal-insulator structure, comprising:
forming one of an electrode and a high k dielectric material, the high k dielectric material comprising a material selected from the group consisting of Al 2 O 3 , Ta 2 O 3 , Bi—Ta—O, Bi—Nb—O, PbMgNbO 3 +PbTiO 3 , PbLaZrTiO 3 , BaSrTiO 3 , (Ba,Sr)Ti 4 O 9 , Ti—Zr—Sn—O, Ta 2 O 5 , lanthanide-(Ta,Nb)—O, Al—Ta—O, HfO 2 , ZrO 2 , doped HfO 2 , and doped ZrO 2 ;
depositing thereon the other of said electrode and high k dielectric material, to form a high dielectric constant metal-insulator structure, wherein the electrode comprises NiO x wherein 1<x<1.5;
forming a second electrode, in contact with said high k dielectric material, wherein the electrodes comprise a bottom electrode and a top electrode, and
depositing a protective capping layer, in direct contact with the top electrode, wherein the protective cap is a vapor deposition layer that protects the high dielectric constant metal-insulator structure from deoxygenation or adverse processing effects incident to gas anneals.
11. The method of claim 10 , wherein the high dielectric constant metal-insulator structure is formed on a substrate, wherein the substrate comprises a material selected from the group consisting of Si, SiO 2 , sapphire, alumina, diamond, graphene, and TiN.
12. The method of claim 10 , wherein NiO x is deposited in a vapor deposition process, wherein the vapor deposition process comprises a process selected from the group consisting of chemical vapor deposition, atomic layer deposition, and pulsed chemical vapor deposition.
13. The method of claim 12 , wherein NiO x is deposited in the vapor deposition process from vapor of a nickel precursor selected from the group consisting of Ni(C 5 H 5 ) 2 , Ni(C 5 H 4 C 2 H 5 ) 2 , [(C 6 H 5 ) 3 P] 2 Ni, and Ni(OCC(CH 3 ) 3 CHCOC(CH 3 ) 3 ) 2 .
14. The method of claim 10 , further comprising annealing the metal-insulator-metal capacitor.