IP Library Granted Patent US 6,880,718
Granted Patent B2
US 6,880,718 · App. 10/318,374 · Granted Apr 19, 2005

Wafer carrier door and spring biased latching mechanism

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Quick Facts
Patent No.
US 6,880,718
App. No.
10/318,374
Granted
Apr 19, 2005
Kind
B2
Abstract

A wafer container having a door with at least one latching mechanism, wherein the latching mechanism has a spring member that holds the latching mechanism at one or more favored positions that preferably correspond to latch-open and latch-closed conditions. In a preferred embodiment, the spring member has an over-center condition that urges the latching mechanism towards the favored positions, thereby resisting unintended actuation of the latching mechanism. Moreover, in preferred embodiments, the latching mechanism has soft stops at the latch open or latch closed condition that minimizes abrupt snapping into position of the latching mechanism. Preferred embodiments utilize a rotatable member configured as a cammed member with an elongate rigid plastic member having at least one node, forming a plastic spring. The spring is pivotally mounted on the rotatable member and pivotally mounted to the door structure.

Claims (51)

1. A wafer container, comprising:

a container portion including a top, a bottom, a pair of opposing sides, a back and an open front;

a pair of wafer supports in the container portion for holding a plurality of horizontally aligned and spaced wafers; and

a door to sealingly close the open front, the door comprising:

a door chassis;

at least one latching mechanism on the door chassis, said latching mechanism having at least one rotary actuating member; and

at least a first spring member operably coupled with the door chassis, said spring member adapted to engage the rotary actuating member and disposed so as to hold the rotary actuating member at a first favored position, said spring member adapted to urge said rotary actuating member toward the first favored position over a first rotational range of said rotary actuating member of at least 5 degrees proximate to the first favored position.

2. The wafer container of claim 1 , wherein said spring member is neutrally biased when said rotary actuating member is at the first favored position.

3. The wafer container of claim 1 , wherein said spring member is also disposed to hold the rotary actuating member at a second favored position and is adapted to urge said rotary actuating member toward the second favored position over a second rotational range of said rotary actuating member of at least 5 degrees proximate to the second favored position.

4. The wafer container of claim 3 , wherein said spring member is neutrally biased when said rotary actuating member is at the second favored position.

5. The wafer container of claim 1 , wherein said spring member has an arcuate shape.

6. The wafer container of claim 1 , wherein said spring member has an s-shape.

7. The wafer container of claim 1 , wherein said spring member is a coil spring.

8. The wafer container of claim 1 , wherein said spring member is a torsion spring.

9. A wafer container, comprising:

a container portion including a top, a bottom, a pair of opposing sides, a back and an open front;

a pair of wafer supports in the container portion for holding a plurality of horizontally aligned and spaced wafers; and

a door to sealingly close the open front, the door comprising:

a door chassis, having at least a first spring pivot;

at least one latching mechanism on the door chassis, said latching mechanism having at least one rotary actuating member, the rotary actuating member having a pivot; and

at least a first spring member, said spring member operably coupled to the spring pivot of said door chassis and to the pivot of the rotary actuating member, said spring member disposed so as to hold the rotary actuating member at a first favored position and adapted to urge said rotary actuating member toward the first favored position over a first rotational range of said rotary actuating member of at least 5 degrees proximate to the first favored position.

10. The wafer container of claim 9 , wherein said spring member is neutrally biased when said rotary actuating member is at the first favored position.

11. The wafer container of claim 9 , wherein said spring member is also disposed to hold the rotary actuating member at a second favored position and is adapted to urge said rotary actuating member toward the second favored position over a second rotational range of said rotary actuating member of at least 5 degrees proximate to the second favored position.

12. The wafer container of claim 10 , wherein said spring member is neutrally biased when said rotary actuating member is at the second favored position.

13. The wafer container of claim 11 , further comprising a second spring member pivotally coupled to the spring pivot of the door chassis and to the pivot of the rotary actuating member.

14. The wafer container of claim 9 , wherein said spring member has an arcuate shape.

15. The wafer container of claim 9 , wherein said spring member has an s-shape.

16. The wafer container of claim 9 , wherein said spring member is a coil spring.

17. A wafer container, comprising:

a container portion including a top, a bottom, a pair of opposing sides, a back and an open front;

a pair of wafer supports in the container portion for holding a plurality of horizontally aligned and spaced wafers; and

a door to sealingly close the open front, the door comprising:

a door chassis;

at least one latching mechanism on the door chassis, said latching mechanism having a rotary actuating member;

means for providing said latching mechanism with at least a first favored position; and

spring means for urging said latching mechanism toward the first favored position over a rotational range of the rotary actuating member of at least 5 degrees proximate to the first favored position.

18. The wafer container of claim 17 , wherein said means for providing said latching mechanism with at least a first favored position, and said spring means comprise at least a first spring member, said spring member coupling the rotary actuating member with said door chassis.

19. The wafer container of claim 18 , wherein said spring member is also disposed to hold the rotary actuating member at a second favored position and is adapted to urge said rotary actuating member toward the second favored position over a second rotational range of said rotary actuating member of at least 5 degrees proximate to the second favored position.

20. The wafer container of claim 17 , further comprising:

means for providing said latching mechanism with at a second favored position; and

spring means for urging said latching mechanism toward the second favored position over a rotational range of the rotary actuating member of at least 5 degrees proximate to the second favored position.

21. The wafer container of claim 20 , wherein said means for providing said latching mechanism with at least a first favored position, said means for providing said latching mechanism with at a second favored position, said spring means for urging said latching mechanism toward a first favored position and said spring means for urging said latching mechanism toward a second favored position comprise at least a first spring member, said spring member coupling the rotary actuating member with said door chassis.

22. A wafer container, comprising:

a container portion including a top, a bottom, a pair of opposing sides, a back and an open front;

a pair of wafer supports in the container portion for holding a plurality of horizontally aligned and spaced wafers; and

a door to sealingly close the open front, the door comprising:

a door chassis;

at least one latching mechanism on the door chassis comprising:

a plurality of latching arms;

a rotary actuating member operably coupled engaged with said plurality of latching arms; and

at least one spring member adapted and disposed so as to urge said at least one latching mechanism toward a first favored position over a first rotational range of said rotary actuating member of at least 5 degrees proximate to the first favored position.

Assignments (7)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →