IP Library Granted Patent US 7,397,547
Granted Patent B2
US 7,397,547 · App. 11/490,575 · Granted Jul 8, 2008

Method and apparatus for a liquid chemical concentration analysis system

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Quick Facts
Patent No.
US 7,397,547
App. No.
11/490,575
Granted
Jul 8, 2008
Kind
B2
Abstract

An apparatus utilizes optical reflectivity (REF) to measure concentrations in liquids. The REF optical system is packaged in a compact and cost-effective form factor. An electronic circuit drives the optical system. The miniaturized REF sensor is situated in an optical-fluidic cell or an optical-fluidic manifold with an optical window in contact with the liquid. Changes in a total internal reflection (TIR) signal are sensitive to temperature and concentration of the liquid. These changes in the TIR signal are used to accurately determine the concentration in the liquid. The liquids may be either static or dynamic.

Claims (34)

1. An optical sensor, comprising:

an optical housing having a housing sensing surface;

an optical window coupled to the housing sensing surface forming a housing sensing surface/optical window interface;

a sensing window having a window sensing surface, the sensing window coupled to the optical window forming an optical window/sensing window interface and such that the window sensing surface is capable of being in direct contact with a sample;

a photodetector array coupled to the optical housing; and

a light source coupled to the optical housing and configured to emit light towards the window sensing surface such that the light will pass through the housing sensing surface/optical window interface and the optical window/sensing window interface, a portion of the light being reflected from the window sensing surface onto the photodetector array, wherein the photodetector array is configured to obtain information about the intensity of the reflected light.

2. The optical sensor of claim 1 , wherein the sensing window is made of a dielectric material.

3. The optical sensor of claim 2 , wherein the dielectric material is sapphire.

4. The optical sensor of claim 2 , wherein the dielectric material is quartz.

5. The optical sensor of claim 2 , wherein the dielectric material is glass.

6. The optical sensor of claim 1 , wherein the sensing window is coupled to the optical window by an optical epoxy.

7. The optical sensor of claim 1 further including a sample housing coupled to the optical housing and including a geometric fluid path that directs the sample toward the sensing surface while enhancing the mixing of the sample at the sensing surface.

8. An optical sensor system, comprising:

an optical housing having a sensing surface that includes an optical window;

a second optical window coupled to the sensing surface such that the second optical window is capable of being in direct contact with a sample at a sample/second optical window interface;

a photodetector array coupled to the optical housing;

a light source coupled to the optical housing and configured to emit light towards the sensing surface, a portion of the light being reflected from the sample/second optical window interface onto the photodetector array, wherein the photodetector array is configured to-obtain information about the intensity of the reflected light; and

a signal processing unit communicatively coupled to the photodetector array, the signal processing unit configured to determine an index of refraction of the sample using the obtained information about the intensity of the reflected light.

9. The optical sensor system of claim 8 , wherein the second optical window is made of a dielectric material.

10. The optical sensor system of claim 9 , wherein the dielectric material is sapphire.

11. The optical sensor system of claim 9 , wherein the dielectric material is quartz.

12. The optical sensor system of claim 9 , wherein the dielectric material is glass.

13. The optical sensor system of claim 8 , wherein the signal processing unit is further configured to determine a concentration of the sample based on at least the index of refraction of the sample.

14. The optical sensor system of claim 8 , wherein the light source is a light emitting diode.

15. The optical sensor of claim 8 further including a sample housing coupled to the optical housing and including a geometric fluid path that directs the sample toward the second optical window while enhancing the mixing of the sample at the sample/second optical window interface.

16. An optical sensor, comprising:

an optical housing having a housing sensing surface and a reflecting surface arranged at an obtuse angle to the housing sensing surface;

an optical window attached to the housing sensing surface;

a planar sapphire optical window having a sample sensing surface coupled to the optical window forming an optical window/sapphire window interface and such that the sample sensing surface is capable of being in direct contact with a sample;

a photodetector array coupled to the optical housing; and

a light emitting diode coupled to the optical housing and configured to emit light towards the sample sensing surface such that the emitted light passes through the optical window/sapphire window interface, wherein a portion of the light reflected from the sample sensing surface is directed onto the photodetector array by the reflecting surface and, wherein the photodetector array is configured to obtain information about the intensity of the reflected light.

17. The optical sensor of claim 16 , wherein the planar sapphire optical window is coupled to the optical window using an optical epoxy.

18. The optical sensor of claim 16 , wherein the sample is a liquid.

19. The optical sensor of claim 16 further including a sample housing coupled to the optical housing and including a geometric fluid path that directs the sample toward the sample sensing surface while enhancing the mixing of the sample at the sample sensing surface.

Assignments (9)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 16, 2013
From: JETALON SOLUTIONS, INC.
To: ENTEGRIS - JETALON SOLUTIONS, INC.
Reel/Frame 030810/0683 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 5, 2008
From: CHIARELLO, RONALD P.; BOYD, CHARLES ERIC; MCPHEE, DUNCAN A.
To: JETALON SOLUTIONS, INC.
Reel/Frame 020902/0393 →