Fluidized granular absorbent bed filter

1. A filter adapted to remove contaminants from a flow of gaseous fluid, the filter comprising:

two or more cells, each cell defined by a porous inlet cover, a porous outlet cover, and sidewalls extending between a cell inlet and a cell outlet, and each cell having a volume between the sidewalls, porous inlet cover, and porous outlet cover,

an intake channel in fluid communication with the cell inlet of one of the two or more cells, the intake channel capable of receiving a flow of fluid moving in a first flow direction and changing the direction of the flow of the gaseous fluid to an upward flow passing through the one of the two or more cells,

an output channel in fluid communication with the cell outlet of the one of the two or more cells, the output channel adapted to receive the gaseous fluid flowing from the one of the two or more cells and changing the direction of flow to a direction that is the same as the first flow direction, and

granular filter media comprising individual granules contained within the volume of each of the two or more cells in a loose fashion that allows individual granules to move within the volume of each of the two or more cells in response to the upward flow of the gaseous fluid passing through each cell, wherein the granules are capable of becoming fluidized within an individual cell by the upward flow of the gaseous fluid passing through the cell.

2. The filter of claim 1 wherein each of the cells is characterized by a depth, which is a distance between the porous inlet cover and the porous outlet cover, the depth being at least 0.5 inches.

3. The filter of claim 1 comprising an array that contains the two or more cells, the array including a layer of cells having a repeating arrangement with cells aligned in parallel in the direction of the upward flow, and areas of the cell inlets aligned in a plane.

4. The filter of claim 3 comprising the array and a frame extending to define a perimeter, the array being supported by the frame within the perimeter, wherein the cells of the array are substantially uniform in volume and substantially uniform in depth.

5. The filter of claim 4 adapted to allow fluid to flow through the cells upwardly in a vertical direction, when the frame is oriented with a length and a width extending in a horizontal plane.

6. The filter of claim 4 adapted to allow the gaseous fluid to flow through the cells upwardly in a vertical direction, when the frame is oriented with a length and a width extending in a vertical plane.

7. The filter of claim 1 , wherein the porous inlet cover is capable of allowing the gaseous fluid to pass into the cell and capable of containing granules within the cell at the cell inlet, and

the porous outlet cover is capable of allowing the gaseous fluid to pass out of the cell, and capable of containing granules within the cell at the cell outlet.

8. The filter of claim 1 wherein the sidewalls are planar and are made of polymeric material.

9. The filter of claim 1 wherein the granules are selected from granules of: cation exchange resin, anion exchange resin, a zeolite, a metal oxide, a salt, natural activated carbon, synthetic activated carbon, and combinations thereof.

10. The filter of claim 1 wherein the granules are selected from chemically coated carbon and chemically coated polymer, the chemical coating comprising an iodide solution, a hydroxide solution, zinc chloride, carbonate solution, bicarbonate solution, amine, citric acid, phosphoric acid, oxalic acid, or sulfuric acid.

11. The filter of claim 1 wherein the granular filter media is capable of removing a contaminant from the flow of gaseous fluid passing through the filter, the contaminant selected from: a volatile acidic gas, a volatile basic gas, a volatile acidic aerosol, and a volatile organic compound.

12. A system for removing contaminants from a flow of gaseous fluid, the system comprising:

ducting to guide the flow of gaseous fluid,

a space in fluid communication with the ducting to place a removable filter assembly in the flow of gaseous fluid to cause the flow of gaseous fluid to flow through the filter assembly,

a removable filter assembly in the space, the removable filter assembly comprising:

two or more cells, each cell defined by a porous inlet cover, a porous outlet cover, and sidewalls extending between a cell inlet and a cell outlet, and each cell having a volume between the sidewalls, porous inlet cover, and porous outlet cover,

an intake channel in fluid communication with the cell inlet of one of the two or more cells, the intake channel capable of receiving a flow of fluid moving in a first flow direction and changing the direction of the flow of the gaseous fluid to an upward flow passing through the one of the two or more cells,

an output channel in fluid communication with the cell outlet of the one of the two or more cells, the output channel adapted to receive the gaseous fluid flowing from the one of the two or more cells and changing the direction of flow to a direction that is the same as the first flow direction, and

granular filter media comprising granules contained within the volume of each of the two or more cells in a loose fashion that allows individual granules to move within the volume of each of the two or more cells in response to the upward flow of gaseous fluid passing through each cell, wherein the granules are capable of becoming fluidized within an individual cell by the upward flow of fluid passing through the cell.

13. The system of claim 12 adapted to remove airborne molecular contaminants from an environment of a clean room.

14. The system of claim 12 wherein the granules are selected from granules of:

cation exchange resin, anion exchange resin, a zeolite, a metal oxide, a salt, natural activated carbon, synthetic activated carbon, and combinations thereof.

15. A method of removing contaminants from a flow of gaseous fluid, the method comprising:

providing a filter comprising:

two or more cells, each cell defined by a porous inlet cover, a porous outlet cover, and sidewalls extending between a cell inlet and a cell outlet, and each cell having a volume between the sidewalls, porous inlet cover, and porous outlet cover,

an intake channel in fluid communication with the cell inlet of one of the two or more cells, the intake channel capable of receiving a flow of fluid moving in a first flow direction and changing the direction of the flow of the gaseous fluid to an upward flow passing through the one of the two or more cells,

an output channel in fluid communication with the cell outlet of the one of the two or more cells, the output channel adapted to receive the gaseous fluid flowing from the one of the two or more cells and changing the direction of flow to a direction that is the same as the first flow direction, and

granular filter media comprising individual granules contained within the volume of each of the two or more cells in a loose fashion that allows individual granules to move within the volume of each of the two or more cells in response to the upward flow of gaseous fluid passing through each cell, wherein the granules are capable of becoming fluidized within an individual cell by the upward flow of fluid passing through the cell, and

causing the gaseous fluid to flow through the two or more cells in a manner to cause the granules to become fluidized by the upward flow of the gaseous fluid.

16. The method of claim 15 wherein the gaseous fluid is air from an environment of a clean room.

17. The method of claim 16 wherein the gaseous fluid contains airborne molecular contaminants that become adsorbed on surfaces of the granular filter media during flow of the fluid through the two or more cells.