Granted Patent
Utility
US 6,770,117
· Confirmation No. 1492
ION IMPLANTATION AND WET BENCH SYSTEMS UTILIZING EXHAUST GAS RECIRCULATION
Inventor:
W. Karl Olander
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-06-07 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2004-04-19 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2004-04-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2004-03-10 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-10 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-03-10 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-25 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-02-25 | SPEC |
Specification | 2 | View | |
| 2004-02-25 | CLM |
Claims | 9 | View | |
| 2004-02-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-02-03 | CTEQ |
Ex Parte Quayle Action | 4 | View | |
| 2004-02-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-02-03 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-03 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-02-21 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-02-21 | SPEC |
Specification | 4 | View | |
| 2003-02-21 | CLM |
Claims | 9 | View | |
| 2003-02-21 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-02-07 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-02-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-01-08 | TRNA |
Transmittal of New Application | 6 | View | |
| 2003-01-08 | CLM |
Claims | 2 | View | |
| 2003-01-08 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-12-04 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2002-10-31 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-10-31 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-10-31 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-10-31 | SPEC |
Specification | 12 | View | |
| 2002-10-31 | CLM |
Claims | 2 | View | |
| 2002-10-31 | ABST |
Abstract | 1 | View | |
| 2002-10-31 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-10-31 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
W. Karl Olander
Indian Shores, FL
Attorneys & Agents of Record
Classification
USPC
95/67
B01D53/74
C23C14/48
C23C14/564
Prosecution
- Examiner
- SPITZER, ROBERT H
- Art Unit
- 1724
- Docket No.
- ATMI-622
- Confirmation No.
- 1492
Publication
- Pub. No.
- US20040083696A1
- Pub. Date
- 2004-05-06
Patent Term Adjustment
-107days
Child
is a Continuation in-part of
→
App. 11/519,681
· US 7,485,169
Filed 2006-09-12
· Patented Case
Child
is a Continuation in-part of
→
App. 10/672,051
· US 7,105,037
Filed 2003-09-26
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 12/364,800
· US 7,857,880
Filed 2009-02-03
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2003/033548
Filed 2003-10-22
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
from
CMC MATERIALS, INC.,
ENTEGRIS GP, INC.,
ENTEGRIS, INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
POCO GRAPHITE, INC.,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY INTEREST
Recorded 2022-07-08
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-04
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
from
OLANDER, W. KARL
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-08
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Quick Facts
- Patent No.
- US 6,770,117
- App. No.
- 10/284,910
- Filed
- 2002-10-31
- Granted
- 2004-08-03
- Pub. No.
- US20040083696A1
- Examiner
- SPITZER, ROBERT H
- Art Unit
- 1724
- PTA
- -107 days
External Links