Diffusion resistant electrostatic clamp
In one embodiment, a method of fabricating an electrostatic clamp includes forming an insulator body, forming an electrode on the insulator body, and depositing a layer stack on the electrode, the layer stack comprising an aluminum oxide layer that is deposited using atomic layer deposition (ALD).
1. An electrostatic clamp, comprising:
an insulator body;
an electrode disposed on the insulator body; and
a layer stack comprising an amorphous aluminum oxide layer having a thickness of 10 micrometers or less and at least one additional insulator layer.
2. The electrostatic clamp of claim 1 , wherein the amorphous aluminum oxide layer has a thickness between 500 nm and 10 micrometers.
3. The electrostatic clamp of claim 1 , wherein the layer stack has a thickness of between 40 micrometers and 200 micrometers.
4. The electrostatic clamp of claim 3 , wherein the layer stack comprises:
an aluminum oxide layer disposed adjacent the electrode; and
at least one additional insulator layer disposed on the aluminum oxide layer.
5. The electrostatic clamp of claim 3 , wherein the layer stack comprises at least one additional insulator layer disposed adjacent the electrode, and the aluminum oxide layer disposed on the at least one additional insulator layer.
6. The electrostatic clamp of claim 1 wherein the at least one additional insulator layer comprises at least one aluminum oxynitride layer and at least one silicon nitride layer.
7. The electrostatic clamp of claim 1 wherein the electrode comprises platinum.
8. An electrostatic clamp system, comprising:
an insulator body;
an electrode comprising a metallic material that is disposed on the insulator body;
a layer stack comprising insulating material having a total thickness of less than 100 micrometers, and including an amorphous aluminum oxide layer having a thickness of 10 micrometers or less; and
a heater configured to heat the insulator body, wherein the electrostatic clamp is configured to operate at 500° C. or greater without diffusion of the metallic material through the layer stack.
9. The electrostatic clamp system of claim 8 , wherein the layer stack comprises:
an aluminum oxide layer disposed adjacent the electrode having a thickness less than 5 micrometers; and
at least one additional insulator layer disposed on the aluminum oxide layer, wherein the total thickness of the layer stack is greater than 40 micrometers.
10. An electrostatic clamp, comprising:
an insulator body;
an electrode disposed on the insulator body; and
a layer stack disposed on the electrode, the layer stack comprising an aluminum oxide layer formed using atomic layer deposition (ALD) and disposed directly on the electrode, wherein the layer stack further comprises:
a plurality of insulator layers, disposed on the aluminum oxide layer, wherein the plurality of insulator layers comprises a nitride layer and an oxynitride layer.
11. The electrostatic clamp of claim 10 ,
wherein the aluminum oxide layer comprises a thickness of between 500 nanometers and 10 micrometers.
12. The electrostatic clamp of claim 10 , wherein the plurality of insulator layers comprising a thickness of between 40 micrometers and 200 micrometers.
13. The electrostatic clamp of claim 10 , wherein the layer stack comprises:
an aluminum oxynitride layer, disposed on the aluminum oxide layer; and
a silicon nitride layer, disposed on the aluminum oxynitride layer.
14. The electrostatic clamp of claim 13 , wherein the aluminum oxynitride layer is a first aluminum oxynitride layer, the silicon nitride layer is a first silicon nitride layer, and the first aluminum oxynitride layer and the first silicon nitride layer together constitute a first overlayer stack, the layer stack further comprising:
a second overlayer stack, disposed on the first overlayer stack, the second overlayer stack comprising:
a second aluminum oxynitride layer, disposed directly on the first silicon nitride layer; and
a second silicon nitride layer, disposed on the second aluminum oxynitride layer.
15. The electrostatic clamp of claim 10 , wherein the layer stack comprises a thickness of 40 micrometers to 75 micrometers.
16. The electrostatic clamp of claim 10 , wherein the aluminum oxide layer comprises an amorphous layer.
17. The electrostatic clamp of claim 10 , wherein the electrode is a platinum electrode.