IP Library Granted Patent US 7,578,407
Granted Patent B2
US 7,578,407 · App. 11/108,349 · Granted Aug 25, 2009

Wafer container with sealable door

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Quick Facts
Patent No.
US 7,578,407
App. No.
11/108,349
Granted
Aug 25, 2009
Kind
B2
Abstract

A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure displacing the bridging portion axially toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure. The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door.

Claims (9)

1. A sealable container for holding a plurality of wafers, the container comprising:

an enclosure portion defining an interior space for receiving the wafers, the enclosure portion having an open side defined by a door frame, the door frame presenting a frame periphery and having a seal engaging member disposed around the frame periphery and protruding outwardly from the door frame, the seal engaging member configured as a continuous rib having a tip, an inwardly facing surface and an outwardly facing surface;

a door fittable in the door frame to sealingly close the open side of the enclosure portion, the door having an interior side and presenting a door periphery; and

an elastomeric seal disposed on the interior side of the door around and inward of the door periphery, the elastomeric seal having an inside edge and an outside edge, the inside edge with an attachment structure for securement to a groove in the door extending therealong, a sealing head structure extending along the outside edge, and a bridging portion coupling the attachment structure and the sealing head structure, the bridging portion and sealing head structure have a T-shape with one arm of the T contacting the door and an opposing arm extending outwardly away from the inside surface of the door, the seal engaging member and the elastomeric seal cooperatively positioned so that when the door is engaged in the door frame, the tip of the seal engaging member first contacts the bridging portion of the elastomeric seal defining a first sealing line of contact along the door periphery, the engagement with the bridging portion pulling the one arm of the T opposite the door in a direction inwardly toward the attachment portion whereby said one arm of the T-shaped portion engages the outwardly facing surface of the seal engaging member defining a second sealing line of contact along the door periphery, and the sealing head structure being in contact with the door defining a third sealing line of contact along the door periphery.

2. The container of claim 1 , wherein the attachment structure contacts the door defining a fourth sealing line of contact along the door periphery.

3. The container of claim 1 , further comprising a standoff structure on the enclosure portion for establishing a depth of engagement for the door when the door is fitted in the door frame.

4. The container of claim 1 , wherein the attachment structure has a plurality of projections and wherein the door has a plurality of structures for receiving the projections to retain the elastomeric seal on the door.

5. The container of claim 1 , thither comprising at least one latching mechanism operably coupled with the door for latching the door in place in the door frame.

6. The container of claim 1 , wherein the seal engaging member has a knife edge engaging portion.

Assignments (10)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 13, 2005
From: TIEBEN, ANTHONY M.; LYSTAD, JOHN
To: ENTEGRIS, INC.
Reel/Frame 016128/0819 →