IP Library › Patent Application 62672879
Patent Application Provisional
App. No. 62/672,879 · Confirmation No. 7601

METHODS AND APPARATUS USING GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATION SYSTEM

Applicant: Entegris, Inc.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2018-07-11 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2018-07-03 PA.. Power of Attorney 1 View
2018-07-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-07-03 TRAN.LET Transmittal Letter 2 View
2018-05-22 N572 Response - Re: Informal Power of Attorney (PTOL-308) 1 View
2018-05-22 APP.FILE.REC Filing Receipt 3 View
2018-05-17 PA.. Power of Attorney 1 View
2018-05-17 TRAN.LET Transmittal Letter 2 View
2018-05-17 TR.PROV Provisional Cover Sheet (SB16) 4 View
2018-05-17 DRW.NONBW Drawings-other than black and white line drawings 5 View
2018-05-17 SPEC Specification 17 View
2018-05-17 CLM Claims 4 View
2018-05-17 ABST Abstract 1 View
2018-05-17 WFEE Fee Worksheet (SB06) 2 View
2018-05-17 N417 Electronic Filing System Acknowledgment Receipt 3 View
2018-05-17 ADS Application Data Sheet 9 View
2018-05-17 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2018-05-17 DRW.SUPP Drawings-black and white line and/or other drawings — View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
62/672,879
Filed
2018-05-17