IP Library Granted Patent US 7,021,667
Granted Patent B2
US 7,021,667 · App. 10/440,458 · Granted Apr 4, 2006

Connector apparatus and system including connector apparatus

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Quick Facts
Patent No.
US 7,021,667
App. No.
10/440,458
Granted
Apr 4, 2006
Kind
B2
Abstract

A connector apparatus is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

Claims (56)

1. A dispense pump and manifold assembly for a disposable fluid separation module having at least three connectors on a top end of the module, comprising:

a dispense pump; and

a quick-connect manifold piped to the dispense pump, the quick-connect manifold arranged to provide simultaneous connection and sealing of the at least three connectors on the top end of the fluid separation module wherein at least one of the three connectors is a gas vent.

2. A quick-connect manifold assembly for a disposable fluid separation module, comprising:

a fluid connector member comprising a first set of at least three connectors extending through the fluid connector member, the connectors being spaced apart and parallel to one another; and

a module receptor configured with the fluid connector member so as to provide the module receptor a limited range of a first movement relative to the fluid connector member, the module receptor receiving a disposable fluid separation module having a second set of connectors, the first set of connectors capable of being substantially simultaneously engaged to, or disengaged from, the second set of connectors on the disposable fluid separation module by the first movement of the module receptor;

wherein at least one connector of the first set of connectors is for introducing liquids to the disposable fluid separation module, at least one connector of the first set of connectors is for withdrawing liquids from the disposable fluid separation module, and at least one connector of the first set of connectors is a gas vent from the disposable fluid separation module.

3. The quick-connect manifold of claim 2 , wherein the module receptor is attached to the fluid connector member.

4. The quick-connect manifold of claim 3 , wherein the module receptor is attached to the fluid connector member by a hinge.

5. The quick-connect manifold of claim 2 , further comprising:

a locking mechanism that locks the receptor to the fluid connector member by a movement in a direction substantially perpendicular to the direction of motion of the first movement.

6. The quick-connect manifold of claim 5 , wherein the locking mechanism is spring-loaded.

7. The quick-connect manifold of claim 5 , wherein the locking mechanism unlocks the receptor from the fluid connector member by a movement in a direction substantially perpendicular to the direction of motion of the first movement.

8. The quick-connect manifold of claim 5 , wherein the locking mechanism locks the receptor to the fluid connector member by a movement in a substantially horizontal direction.

9. The quick-connect manifold of claim 2 , wherein the receptor is adapted to support the disposable fluid separation module in alignment with the fluid connector member, the receptor comprising at least one slot that is configured to mate with a corresponding protrusion on the fluid separation module to facilitate alignment of the fluid separation module with the fluid connector member.

10. The quick-connect manifold of claim 2 , wherein the first set of connectors extend in a substantially vertical direction from a first surface of the fluid connector member.

11. The quick-connect manifold of claim 2 , wherein at least one of the connector for introducing liquids and the connector for withdrawing liquids is in fluid communication with a fluid pump.

12. The quick-connect manifold of claim 11 , wherein the pump is close-coupled to the fluid connector member to minimize extraneous fluid connections.

13. The quick-connect manifold of claim 2 , wherein the first movement of the module receptor is a substantially vertical movement.

14. A fluid processing system, comprising:

a fluid pump apparatus having a fluid inlet and a fluid outlet; and

a quick-connect manifold comprising:

a fluid connector member comprising a first set of at least three connectors extending through the fluid connector member, the connectors being spaced apart and parallel to one another, at least one connector being in fluid communication with the fluid inlet or the fluid outlet of the pump apparatus; and

a module receptor attached to the fluid connector member so as to provide the module receptor a limited range of a first movement relative to the fluid connector member, the module receptor receiving a disposable fluid separation module having a second set of connectors, the first set of connectors capable of being substantially simultaneously engaged to, or disengaged from, the second set of connectors on the disposable fluid separation module by the first movement of the module receptor;

wherein at least one connector of the first set of connectors is for introducing liquids to the disposable fluid separation module, at least one connector of the first set of connectors is for withdrawing liquids from the disposable fluid separation module, and at least one connector of the first set of connectors is a gas vent from the disposable fluid separation module.

15. The fluid processing system of claim 14 , wherein the quick-connect manifold is mounted underneath the pump apparatus.

16. The fluid processing system of claim 15 , wherein the pump apparatus and the manifold have width dimensions, and the width of the manifold does not exceed the width of the pump.

17. The fluid processing system of claim 14 , wherein the system is part of a fluid dispensing apparatus.

18. The fluid processing system of claim 17 , wherein the pump apparatus comprises a dispense pump for dispensing process fluids onto a semiconductor wafer.

19. The fluid processing system of claim 17 , wherein the pump apparatus comprises a feed pump for pumping fluid through the fluid separation module.

20. The fluid processing system of claim 17 , wherein the pump apparatus comprises a dispense pump and a feed pump.

21. The fluid processing system of claim 14 , wherein the receptor is adapted to support the disposable fluid separation module in alignment with the fluid connector member.

22. The fluid processing system of claim 14 , wherein the first movement of the module receptor is a substantially vertical movement.

23. The fluid processing system of claim 14 , wherein the quick-connect manifold is mated with a connector apparatus comprising:

a body including a flange to be received in a slot of the fluid processing system, an outer surface of the body having a configuration of fluid connectors that is substantially similar to a configuration of the second set of connectors of the disposable fluid separation module, the connector apparatus substituting for the disposable fluid separation module during a purging process; and

the fluid connectors of said connector apparatus being in fluid communication by an open fluid pathway therein which is free of a filtration means.

24. The fluid processing system of claim 14 , wherein the quick-connect manifold is mated with the disposable fluid separation module, the disposable fluid separation module comprising:

a housing having a separation element contained within said housing to divide the interior of said housing into first and second volumes, said separation element comprising a membrane, wherein said membrane comprises a microporous membrane, reverse osmosis membrane, or ultrafiltration membrane, and wherein said first volume is upstream of said membrane and said second volume is downstream of said volume;

an end cap attached to said housing;

a first connector, of the second set of connectors, for introducing a liquid into the interior of said housing and a second connector, of the second set of connectors, for removing permeate from the interior of said housing, wherein the first connector and the second connector are located at a first end of the disposable fluid separation module, and wherein the first connector is mated with the at least one connector of the first set of connectors for introducing liquids to the disposable fluid separation module, and the second connector is mated with the at least one connector of the first set of connectors for withdrawing liquids from the disposable fluid separation module;

a second end of the disposable fluid separation module being free of an active connector;

a conduit in fluid communication with said first connector and said second end so as to direct flow between said first connector and said second end;

said second end being in fluid communication with said first volume;

said second volume being in fluid communication with said second connector; and

a gas vent, of the second set of connectors, the gas vent being located at said first end and being in fluid communication with said first volume or said second volume, wherein the gas vent of the second connector is mated with the gas vent of the first set of connectors for venting a gas from the disposable fluid separation module.

25. A fluid processing system, comprising:

a fluid pump apparatus having a fluid inlet and a fluid outlet; and

a quick-connect manifold comprising:

a fluid connector member comprising a first set of at least three connectors extending through the fluid connector member, the connectors being spaced apart and parallel to one another, at least one connector being in fluid communication with the fluid inlet or the fluid outlet of the pump apparatus;

a module receptor attached to the fluid connector member so as to provide the module receptor a limited range of a first movement relative to the fluid connector member, the module receptor receiving a disposable fluid separation module having a second set of connectors, the first set of connectors capable of being substantially simultaneously engaged to, or disengaged from, the second set of connectors on the disposable fluid separation module by the first movement of the module receptor; and

a locking mechanism that locks the receptor to the fluid connector member by a movement in a direction substantially perpendicular to the direction of the first movement required for engagement of the first set of connectors to the second set of connectors on the fluid separation module;

wherein at least one connector of the first set of connectors is for introducing liquids to the disposable fluid separation module, at least one connector of the first set of connectors is for withdrawing liquids from the disposable fluid separation module, and at least one connector of the first set of connectors is a gas vent from the disposable fluid separation module.

26. The fluid processing system of claim 25 , wherein the locking mechanism unlocks the receptor from the fluid connector member by a movement in a direction substantially perpendicular to the direction of motion of the first movement.

27. The fluid processing system of claim 25 , wherein the first movement of the module receptor is a substantially vertical movement.

28. The fluid processing system of claim 25 , wherein the locking mechanism locks the receptor to the fluid connector member by a movement in a substantially horizontal direction.

29. The fluid processing system of claim 25 , wherein the locking mechanism is spring-loaded.

Assignments (4)
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Recorded Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
SECURITY INTEREST Recorded Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →