Granted Patent
Utility
US 6,566,315
· Confirmation No. 2339
FORMULATIONS INCLUDING A 1,3-DICARBONYL COMPOUND CHELATING AGENT AND COPPER CORROSION INHIBITING AGENTS FOR STRIPPING RESIDUES FROM SEMICONDUCTOR SUBSTRATES CONTAINING COPPER STRUCTURES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-08-23 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2011-07-19 | COCIN |
Request for Certificate of Correction | 1 | View | |
| 2011-07-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-07-19 | COCIN |
Request for Certificate of Correction | 2 | View | |
| 2001-12-05 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-12-05 | SPEC |
Specification | 10 | View | |
| 2001-12-05 | CLM |
Claims | 10 | View | |
| 2001-12-05 | ABST |
Abstract | 1 | View | |
| 2001-12-05 | DRW |
Drawings-only black and white line drawings | 2 | View |
Inventors
William A. Wojtczak
Austin, TX
Ma. Fatima Seijo
Hayward, CT
Dave Bernhard
Newtown, CT
Long Nguyen
San Jose, CA
Attorneys & Agents of Record
Classification
USPC
510/175
H10P70/234
C11D7/50
C11D2111/22
H10P50/287
H10P70/273
H10P70/15
C11D3/0073
C11D3/2072
C11D7/02
C11D7/261
C11D7/264
C11D7/265
C11D7/266
C11D7/32
C11D7/3209
C11D7/3218
C11D7/3245
C11D7/3263
C11D7/3272
C11D7/3281
C11D7/34
C11D7/5009
C11D7/5013
C23G5/02
G03F7/425
Prosecution
- Examiner
- WEBB, GREGORY E
- Art Unit
- 1751
- Customer No.
- 25559
- Docket No.
- ATMI-395 CIP II
- Confirmation No.
- 2339
Publication
- Pub. No.
- US20020132744A1
- Pub. Date
- 2002-09-19
Patent Term Adjustment
-65days
Parent
is a Continuation in-part of
→
App. 09/732,370
· US 6,344,432
Filed 2000-12-08
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2002/038314
Filed 2002-12-02
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679
Recorded 2019-11-05
SECURITY INTEREST
Recorded 2018-11-13
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-12-19
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-12
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Quick Facts
- Patent No.
- US 6,566,315
- App. No.
- 10/007,490
- Filed
- 2001-12-05
- Granted
- 2003-05-20
- Pub. No.
- US20020132744A1
- Examiner
- WEBB, GREGORY E
- Art Unit
- 1751
- PTA
- -65 days
External Links