Patent Assignment
Reel/Frame 011612/0446
Assignment of Assignor's Interest
Recorded: 2001-03-06
Received: 2001-03-27
Pages: 4
Assignor
NAKAGAWA, HIDEO
Executed: 2001-02-21
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA, JPX, 571-8, JAPAN
Covered Property
(1)
Method for Etching Organic Film, Method for Fabricating Semiconductor Device and Pattern Formation Method
Application:
09/798,913 →