IP Library Granted Patent US 6,518,191
Granted Patent Utility
US 6,518,191 · Confirmation No. 2489

METHOD FOR ETCHING ORGANIC FILM, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PATTERN FORMATION METHOD

Inventor: Hideo Nakagawa
⬇ PDF
Code Description Pages PDF
2001-03-06 TRNA Transmittal of New Application 2 View
2001-03-06 ADS Application Data Sheet 1 View
2001-03-06 SPEC Specification 42 View
2001-03-06 CLM Claims 2 View
2001-03-06 ABST Abstract 1 View
2001-03-06 DRW Drawings-only black and white line drawings 15 View
2001-03-06 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,518,191
App. No.
09/798,913
Filed
2001-03-06
Granted
2003-02-11
Pub. No.
US20010046780A1
Art Unit
1765
PTA
-120 days