Granted Patent
Utility
US 6,518,191
· Confirmation No. 2489
METHOD FOR ETCHING ORGANIC FILM, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PATTERN FORMATION METHOD
Inventor:
Hideo Nakagawa
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-06 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-06 | ADS |
Application Data Sheet | 1 | View | |
| 2001-03-06 | SPEC |
Specification | 42 | View | |
| 2001-03-06 | CLM |
Claims | 2 | View | |
| 2001-03-06 | ABST |
Abstract | 1 | View | |
| 2001-03-06 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2001-03-06 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Hideo Nakagawa
Oumihachiman-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/710
H10P50/287
H10W20/086
H10W20/082
H10P50/73
Prosecution
- Examiner
- CHEN, KIN CHAN
- Art Unit
- 1765
- Customer No.
- 22204
- Docket No.
- 740819-509
- Confirmation No.
- 2489
Foreign Priority
2000-155828
·
2000-05-26
·
JAPAN
Publication
- Pub. No.
- US20010046780A1
- Pub. Date
- 2001-11-29
Patent Term Adjustment
-120days
No related applications found.
CHANGE OF NAME
Recorded 2014-09-19
from
KNOX, GREGORY D.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-07-05
MERGER
Recorded 2002-10-29
from
NAKAGAWA, HIDEO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-06
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Quick Facts
- Patent No.
- US 6,518,191
- App. No.
- 09/798,913
- Filed
- 2001-03-06
- Granted
- 2003-02-11
- Pub. No.
- US20010046780A1
- Examiner
- CHEN, KIN CHAN
- Art Unit
- 1765
- PTA
- -120 days
External Links