Patent Assignment
Reel/Frame 011626/0665
Assignment of Assignor's Interest
Recorded: 2001-03-19
Received: 2001-04-02
Pages: 5
Assignee
ANGSTRON SYSTEMS, INC.
71 BONAVENTURA DRIVE, SAN JOSE, CA, 95134, UNITED STATES
Covered Property
(1)
Sequential Method for Depositing a Film by Modulated Ion-Induced Atomic Layer Deposition (Mii-Ald)
Application:
09/812,285 →