Granted Patent
Utility
US 6,428,859
· Confirmation No. 2334
SEQUENTIAL METHOD FOR DEPOSITING A FILM BY MODULATED ION-INDUCED ATOMIC LAYER DEPOSITION (MII-ALD)
Patented Case
View Patent ↗
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2009-01-12 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2008-11-20 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-03-19 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-19 | SPEC |
Specification | 28 | View | |
| 2001-03-19 | CLM |
Claims | 9 | View | |
| 2001-03-19 | ABST |
Abstract | 1 | View | |
| 2001-03-19 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2001-03-19 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Tony P. Chiang
Santa Clara, CA
Karl F. Leeser
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
427/457
C23C16/45538
H10W20/033
H10P14/432
H10W20/042
C23C16/45525
C23C16/45544
C23C16/46
C23C16/463
C23C16/466
C23C16/481
C23C16/483
Prosecution
- Examiner
- PIANALTO, BERNARD D
- Art Unit
- 1762
- Customer No.
- 84012
- Docket No.
- NVLS002965
- Confirmation No.
- 2334
Patent Term Adjustment
-91days
Parent
Claims priority from a provisional application
→
App. 60/251,795
Filed 2000-12-06
· Provisional Application Expired
Child
PCT
is a Continuation of
→
PCT/US2001/049905
Filed 2001-11-09
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation of
→
App. 12/510,922
· US 9,255,329
Filed 2009-07-28
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 10/137,851
· US 6,569,501
Filed 2002-05-03
· Patented Case
Child
is a Continuation of
→
App. 10/215,711
Filed 2002-08-08
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation in-part of
→
App. 10/900,528
Filed 2004-07-28
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation in-part of
→
App. 11/737,118
· US 7,601,393
Filed 2007-04-18
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 10/900,830
Filed 2004-07-28
· Expressly Abandoned -- During Examination
Child
is a Continuation of
→
App. 12/895,635
Filed 2010-09-30
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
is a Continuation of
→
PCT/US2001/050350
Filed 2001-11-09
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation of
→
App. 11/601,491
· US 7,871,676
Filed 2006-11-16
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-06-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-19
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Quick Facts
- Patent No.
- US 6,428,859
- App. No.
- 09/812,285
- Filed
- 2001-03-19
- Granted
- 2002-08-06
- Examiner
- PIANALTO, BERNARD D
- Art Unit
- 1762
- PTA
- -91 days
External Links