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App. No. 10/900,528 · Confirmation No. 8052

Temperature control system in an ALD chamber

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2007-07-23 ABN Abandonment 2 View
2007-02-09 CTAV Advisory Action (PTOL-303) 3 View
2007-02-09 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2007-01-19 A.NE Response After Final Action 3 View
2007-01-19 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2007-01-19 A.NE Response After Final Action 3 View
2007-01-19 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2006-11-14 CTFR Final Rejection 10 View
2006-11-14 892 List of references cited by examiner 1 View
2006-11-14 SRFW Search information including classification, databases and other search related notes 1 View
2006-08-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2006-08-30 CLM Claims 5 View
2006-08-30 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2006-08-30 WFEE Fee Worksheet (SB06) 1 View
2006-05-31 CTNF Non-Final Rejection 11 View
2006-05-31 892 List of references cited by examiner 1 View
2006-05-31 FOR Foreign Reference 6 View
2006-05-31 FWCLM Index of Claims 1 View
2006-05-31 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-30 SRNT Examiner's search strategy and results 5 View
2006-03-15 RCEX Request for Continued Examination (RCE) 3 View
2006-03-15 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2006-03-15 WFEE Fee Worksheet (SB06) 1 View
2006-02-28 CTAV Advisory Action (PTOL-303) 3 View
2006-02-28 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2006-02-13 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 3 View
2006-02-13 CLM Claims 4 View
2006-02-13 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2006-02-13 WFEE Fee Worksheet (SB06) 1 View
2005-12-16 CTFR Final Rejection 10 View
2005-12-16 1449 List of References cited by applicant and considered by examiner 3 View
2005-12-16 892 List of references cited by examiner 1 View
2005-12-16 FWCLM Index of Claims 1 View
2005-12-16 SRFW Search information including classification, databases and other search related notes 1 View
2005-12-09 SRNT Examiner's search strategy and results 3 View
2005-09-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2005-09-23 CLM Claims 4 View
2005-09-23 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-09-23 WFEE Fee Worksheet (SB06) 1 View
2005-06-23 CTNF Non-Final Rejection 10 View
2005-06-23 1449 List of References cited by applicant and considered by examiner 3 View
2005-06-23 892 List of references cited by examiner 1 View
2005-06-23 FWCLM Index of Claims 1 View
2005-06-23 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-13 SRNT Examiner's search strategy and results 2 View
2004-07-28 TRNA Transmittal of New Application 2 View
2004-07-28 SPEC Specification 21 View
2004-07-28 CLM Claims 11 View
2004-07-28 ABST Abstract 1 View
2004-07-28 DRW Drawings-only black and white line drawings 5 View
2004-07-28 OATH Oath or Declaration filed 3 View
2004-07-28 A.PE Preliminary Amendment 1 View
2004-07-28 SPEC Specification 2 View
2004-07-28 CLM Claims 4 View
2004-07-28 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-07-28 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-07-28 WFEE Fee Worksheet (SB06) 1 View
2004-07-28 WFEE Fee Worksheet (SB06) 1 View
2004-07-28 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
10/900,528
Filed
2004-07-28
Pub. No.
US20050000937A1
Art Unit
1763