Patent Application
Utility
Small
App. No. 09/812,352
· Confirmation No. 1760
System and method for modulated ion-induced atomic layer deposition (MII-ALD)
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-19 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-19 | SPEC |
Specification | 28 | View | |
| 2001-03-19 | CLM |
Claims | 13 | View | |
| 2001-03-19 | ABST |
Abstract | 1 | View | |
| 2001-03-19 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2001-03-19 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Tony P. Chiang
Santa Clara, CA
Karl F. Leeser
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
118/248
C23C16/08
H10W20/033
H10P14/432
H10W20/042
C23C16/0227
C23C16/34
C23C16/401
C23C16/45525
C23C16/45538
C23C16/45544
C23C16/46
C23C16/463
C23C16/466
C23C16/481
C23C16/483
C23C16/511
Prosecution
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
- Customer No.
- 22830
- Docket No.
- PA1662US
- Confirmation No.
- 1760
Publication
- Pub. No.
- US20020104481A1
- Pub. Date
- 2002-08-08
Parent
Claims priority from a provisional application
→
App. 60/251,795
Filed 2000-12-06
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/254,280
Filed 2000-12-06
· Provisional Application Expired
Child
PCT
is a Continuation of
→
PCT/US2001/049905
Filed 2001-11-09
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation in-part of
→
App. 11/737,118
· US 7,601,393
Filed 2007-04-18
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 10/900,528
Filed 2004-07-28
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation in-part of
→
App. 10/900,830
Filed 2004-07-28
· Expressly Abandoned -- During Examination
Child
PCT
is a Continuation of
→
PCT/US2001/044300
Filed 2001-11-26
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
PCT
is a Continuation of
→
PCT/US2001/050350
Filed 2001-11-09
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-19
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Quick Facts
- App. No.
- 09/812,352
- Filed
- 2001-03-19
- Pub. No.
- US20020104481A1
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
External Links