Patent Application
Utility
App. No. 10/900,830
· Confirmation No. 7571
Controlling the temperature of a substrate in a film deposition apparatus
Expressly Abandoned -- During Examination
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-05-03 | EABN |
Letter Express Abandonment of the application | 1 | View | |
| 2007-05-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-03-20 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2007-03-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-03-01 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 6 | View | |
| 2007-03-01 | FOR |
Foreign Reference | 6 | View | |
| 2007-03-01 | FOR |
Foreign Reference | 14 | View | |
| 2007-03-01 | FOR |
Foreign Reference | 13 | View | |
| 2007-03-01 | FOR |
Foreign Reference | 24 | View | |
| 2007-03-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-03-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2007-03-01 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2007-02-27 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2007-02-27 | SPEC |
Specification | 5 | View | |
| 2007-02-27 | CLM |
Claims | 3 | View | |
| 2007-02-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2007-02-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2006-11-27 | CTNF |
Non-Final Rejection | 9 | View | |
| 2006-11-27 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2006-11-27 | 892 |
List of references cited by examiner | 1 | View | |
| 2006-11-27 | FWCLM |
Index of Claims | 1 | View | |
| 2006-11-27 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2006-11-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2006-11-20 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2004-07-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2004-07-28 | SPEC |
Specification | 21 | View | |
| 2004-07-28 | CLM |
Claims | 11 | View | |
| 2004-07-28 | ABST |
Abstract | 1 | View | |
| 2004-07-28 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2004-07-28 | OATH |
Oath or Declaration filed | 3 | View | |
| 2004-07-28 | A.PE |
Preliminary Amendment | 1 | View | |
| 2004-07-28 | SPEC |
Specification | 2 | View | |
| 2004-07-28 | CLM |
Claims | 2 | View | |
| 2004-07-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-07-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2004-07-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-07-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-07-21 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View |
Inventors
Tony P. Chiang
Santa Clara, CA
Karl F. Leeser
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
427/248.1
C23C16/08
H10W20/033
H10W20/043
H10W20/031
H10P14/432
C23C16/0227
C23C16/34
C23C16/401
C23C16/45525
C23C16/45527
C23C16/45536
C23C16/45538
C23C16/45544
C23C16/46
C23C16/463
C23C16/466
C23C16/481
C23C16/483
C23C16/511
Prosecution
- Examiner
- GAMBETTA, KELLY M
- Art Unit
- 1762
- Customer No.
- 32566
- Docket No.
- ANG-PA1663US-1D
- Confirmation No.
- 7571
Publication
- Pub. No.
- US20050011457A1
- Pub. Date
- 2005-01-20
Parent
is a Division of
→
App. 09/854,092
· US 6,878,402
Filed 2001-05-10
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/812,285
· US 6,428,859
Filed 2001-03-19
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/812,352
Filed 2001-03-19
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Continuation in-part of
→
App. 09/812,486
· US 6,416,822
Filed 2001-03-19
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/251,795
Filed 2000-12-06
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/254,280
Filed 2000-12-06
· Provisional Application Expired
Child
is a Continuation of
→
App. 11/737,118
· US 7,601,393
Filed 2007-04-18
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 12/510,922
· US 9,255,329
Filed 2009-07-28
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 10/900,830
- Filed
- 2004-07-28
- Pub. No.
- US20050011457A1
- Examiner
- GAMBETTA, KELLY M
- Art Unit
- 1762
External Links