Patent Application
Utility
App. No. 12/895,635
· Confirmation No. 8109
System for Depositing a Film by Modulated Ion-Induced Atomic Layer Deposition (MII-ALD)
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-08-24 | ABN |
Abandonment | 2 | View | |
| 2011-01-27 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2011-01-18 | CTNF |
Non-Final Rejection | 5 | View | |
| 2011-01-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2011-01-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-01-18 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2011-01-18 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2011-01-18 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2010-10-19 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-10-19 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-09-30 | TRNA |
Transmittal of New Application | 1 | View | |
| 2010-09-30 | SPEC |
Specification | 35 | View | |
| 2010-09-30 | CLM |
Claims | 4 | View | |
| 2010-09-30 | ABST |
Abstract | 1 | View | |
| 2010-09-30 | A.PE |
Preliminary Amendment | 1 | View | |
| 2010-09-30 | SPEC |
Specification | 1 | View | |
| 2010-09-30 | CLM |
Claims | 1 | View | |
| 2010-09-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2010-09-30 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2010-09-30 | OATH |
Oath or Declaration filed | 3 | View | |
| 2010-09-30 | PA.. |
Power of Attorney | 2 | View | |
| 2010-09-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2010-09-30 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-09-30 | ADS |
Application Data Sheet | 5 | View | |
| 2010-09-30 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-09-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-09-30 | 136A |
Authorization for Extension of Time all replies | 3 | View | |
| 2010-09-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-09-30 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Tony P. Chiang
Campbell, CA
Karl F. Leeser
San Jose, CA
Attorneys & Agents of Record
Classification
USPC
118/715
C23C16/452
H10W20/031
H10P14/432
C23C16/0227
C23C16/08
C23C16/34
C23C16/401
C23C16/45525
C23C16/45538
C23C16/4554
C23C16/45544
C23C16/46
C23C16/463
C23C16/466
C23C16/481
C23C16/483
C23C16/515
H01J37/32192
H01J37/32357
Prosecution
- Examiner
- FORD, NATHAN K
- Art Unit
- 1716
- Customer No.
- 84012
- Docket No.
- NVLS002961C3D1
- Confirmation No.
- 8109
Publication
- Pub. No.
- US20110017139A1
- Pub. Date
- 2011-01-27
Parent
is a Division of
→
App. 11/601,491
· US 7,871,676
Filed 2006-11-16
· Patented Case
Parent
is a Continuation of
→
App. 10/215,711
Filed 2002-08-08
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Continuation in-part of
→
App. 10/137,851
· US 6,569,501
Filed 2002-05-03
· Patented Case
Parent
is a Continuation of
→
App. 09/812,285
· US 6,428,859
Filed 2001-03-19
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/251,795
Filed 2000-12-06
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/254,280
Filed 2000-12-06
· Provisional Application Expired
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 12/895,635
- Filed
- 2010-09-30
- Pub. No.
- US20110017139A1
- Examiner
- FORD, NATHAN K
- Art Unit
- 1716
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