Patent Assignment
Reel/Frame 011660/0326
Assignment of Assignor's Interest
Recorded: 2001-03-27
Pages: 3
Assignor
NAGAKURA, YUTAKA
Executed: 2001-03-15
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Air-Tight Vessel Equipped with Gas Feeder Uniformly Supplying Gaseous Component Around Plural Wafers
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.