Patent Assignment
Reel/Frame 011665/0008
Assignment of Assignor's Interest
Recorded: 2001-03-29
Received: 2001-04-16
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Apparatus and Methods for Aligning a Surface of an Active Retainer Ring with a Wafer Surface for Chemical Mechanical Polishing
Application:
09/823,169 →