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App. No. 09/823,169 · Confirmation No. 9249

APPARATUS AND METHODS FOR ALIGNING A SURFACE OF AN ACTIVE RETAINER RING WITH A WAFER SURFACE FOR CHEMICAL MECHANICAL POLISHING

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 Code Description Pages PDF
2003-11-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-11-21 A.NA Amendment after Notice of Allowance (Rule 312) 1 View
2003-11-21 ABST Abstract 1 View
2003-11-21 CLM Claims 8 View
2003-11-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2001-03-29 TRNA Transmittal of New Application 3 View
2001-03-29 SPEC Specification 28 View
2001-03-29 CLM Claims 11 View
2001-03-29 ABST Abstract 1 View
2001-03-29 DRW Drawings-only black and white line drawings 16 View
2001-03-29 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/823,169
Filed
2001-03-29
Granted
2004-03-23
Pub. No.
US20020151254A1
Art Unit
3723
PTA
-247 days