Patent Assignment
Reel/Frame 011665/0444
Assignment of Assignor's Interest
Recorded: 2001-03-30
Received: 2001-04-16
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Apparatus for Accurate Endpoint Detection in Supported Polishing Pads
Application:
09/823,685 →