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App. No. 09/823,685 · Confirmation No. 6103

APPARATUS FOR ACCURATE ENDPOINT DETECTION IN SUPPORTED POLISHING PADS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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 Code Description Pages PDF
2003-09-08 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-09-08 LET. Miscellaneous Incoming Letter 1 View
2003-09-08 DRW Drawings-only black and white line drawings 14 View
2001-08-06 TRNA Transmittal of New Application 2 View
2001-08-06 DRW Drawings-only black and white line drawings 14 View
2001-03-30 TRNA Transmittal of New Application 3 View
2001-03-30 SPEC Specification 33 View
2001-03-30 CLM Claims 7 View
2001-03-30 ABST Abstract 1 View
2001-03-30 DRW Drawings-only black and white line drawings 14 View
2001-03-30 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/823,685
Filed
2001-03-30
Granted
2003-11-04
Art Unit
3723
PTA
-14 days