Assignment of Assignor's Interest

Recorded: 2002-03-04 Received: 2002-03-21 Pages: 2

Assignors

STEIMAN, MICHAEL DAVID

Executed: 2001-10-30

JIA, KANG

Executed: 2001-11-15

FREDERICKSON, CHRISTIAN DAVID

Executed: 2002-01-18

ZHAO, EUGENE Y.

Executed: 2002-01-18

LITVAK, HERBERT ELLIOT

Executed: 2002-02-06

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES

Covered Property (1)

Apparatus for Accurate Endpoint Detection in Supported Polishing Pads

Application: 09/823,685 →