Patent Assignment
Reel/Frame 011666/0481
Assignment of Assignor's Interest
Recorded: 2001-04-03
Received: 2001-04-16
Pages: 3
Assignor
KUNUGI, TAKAHARU
Executed: 2001-03-28
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Supply of controlled amount of polishing slurry to semiconductor wafers
Application:
09/825,174 →