Patent Assignment
Reel/Frame 011671/0622
Assignment of Assignor's Interest
Recorded: 2001-03-29
Received: 2001-04-16
Pages: 2
Assignor
SALDANA, MIGUEL A.
Executed: 2001-03-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Apparatus and Methods with Resolution Enhancement Feature for Improving Accuracy of Conversion of Required Chemical Mechanical Polishing Pressure to Force to Be Applied by Polishing Head to Wafer
Application:
09/823,151 →