Assignment of Assignor's Interest

Recorded: 2001-04-05 Received: 2001-04-20 Pages: 2

Assignor

YAMANA, MITSUHARU

Executed: 2001-03-30

Assignee

NEC CORPORATION

7-1 SHIBA 5-CHOME, MINATO-KU, TOKYO, 108-01, JPX, JAPAN

Covered Properties (2)

Resist Pattern Forming Method and Semiconductor Device Manufacturing Method

Application: 09/826,006 →

Methods and Devices to Control Polymerization

Application: 09/818,919 →