IP Library › Patent Application 09826006
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App. No. 09/826,006 · Confirmation No. 3888

RESIST PATTERN FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Inventor: Mitsuharu Yamana
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-04-05 TRNA Transmittal of New Application 2 View
2001-04-05 ADS Application Data Sheet 1 View
2001-04-05 SPEC Specification 19 View
2001-04-05 CLM Claims 3 View
2001-04-05 ABST Abstract 1 View
2001-04-05 DRW Drawings-only black and white line drawings 8 View
2001-04-05 OATH Oath or Declaration filed 2 View
2001-04-05 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
09/826,006
Filed
2001-04-05
Granted
2003-04-08
Pub. No.
US20010029107A1
Art Unit
2829
PTA
-2 days